Comment asml SNF 2011-03-28 08:57:58: Hotspot 3/28

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Mar 28 08:57:59 PDT 2011

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2 small hotspots on test wafer at 7 and 11 oclock. Cleaned echuck with tooling. Retest OK.

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