Comment asml SNF 2011-03-31 09:23:31: Hotspot 3/31
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Thu Mar 31 09:23:31 PDT 2011
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Comment asml SNF 2011-03-30 15:15:31: Hotspot 3/30 am
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1 hotspot at 10 Oclock. Cleaned e-chuck with tooling. Retest OK
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Comment asml SNF 2011-03-30 15:15:31: Hotspot 3/30 am
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