From joho at snf.stanford.edu Tue May 3 09:51:20 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 3 May 2011 09:51:20 -0700 Subject: Comment asml SNF 2011-05-03 09:51:19: ASML tool time till 4PM Message-ID: All, ASML has tool time till 4PM. The tool is not hard down and should be up at 4PM. From vilanova at snf.stanford.edu Tue May 3 13:57:37 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 May 2011 13:57:37 -0700 Subject: Comment asml SNF 2011-05-03 13:57:36: hotspots Message-ID: Hotspot at 3:00 o'clock position, Joey cleaned E-Chuck, no hotspots From lindaohara at snf.stanford.edu Wed May 4 10:26:16 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 4 May 2011 10:26:16 -0700 Subject: Comment asml SNF 2011-05-04 10:26:15: Hotspots Message-ID: 3 hotspots found at 6:00 o'clock and 7 o'clock. Joey cleaned E-Chuck and no hotspots From lindaohara at snf.stanford.edu Wed May 4 10:28:12 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 4 May 2011 10:28:12 -0700 Subject: Comment asml SNF 2011-05-04 10:28:11: ASML 3D Calibration Message-ID: From joho at snf.stanford.edu Wed May 4 14:14:14 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 4 May 2011 14:14:14 -0700 Subject: Comment asml SNF 2011-05-04 14:14:13: ASML DEMO COMPLETE Message-ID: ASML DEMO is Complete for the day. System is returned back to Stanford. The 3D Optics had contamination, the Optics were cleaned and the 3D subsystem was recalibrated. All data is in specifications. From gsosa at snf.stanford.edu Thu May 5 07:29:32 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 May 2011 07:29:32 -0700 Subject: Comment asml SNF 2011-04-18 09:13:25: Hotspot 4/18 Message-ID: To Archive From gsosa at snf.stanford.edu Thu May 5 07:29:36 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 May 2011 07:29:36 -0700 Subject: Comment asml SNF 2011-04-19 08:39:51: ASML Demo Time Message-ID: To Archive From gsosa at snf.stanford.edu Thu May 5 07:29:42 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 May 2011 07:29:42 -0700 Subject: Comment asml SNF 2011-04-19 12:25:19: Hotspot 4/19 Message-ID: To Archive From gsosa at snf.stanford.edu Thu May 5 07:29:56 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 May 2011 07:29:56 -0700 Subject: Comment asml SNF 2011-04-20 10:13:21: ASML Demo Time Message-ID: To Archive From gsosa at snf.stanford.edu Thu May 5 07:30:03 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 May 2011 07:30:03 -0700 Subject: Comment asml SNF 2011-04-25 08:19:56: Hotspot 4/25 Message-ID: To Archive From gsosa at snf.stanford.edu Thu May 5 07:30:11 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 May 2011 07:30:11 -0700 Subject: Comment asml SNF 2011-04-26 23:18:58: Possible hotspot in center Message-ID: To Archive From gsosa at snf.stanford.edu Thu May 5 07:30:15 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 May 2011 07:30:15 -0700 Subject: Comment asml SNF 2011-04-27 08:51:56: Hotspot Ck OK Message-ID: To Archive From gsosa at snf.stanford.edu Thu May 5 07:30:20 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 May 2011 07:30:20 -0700 Subject: Comment asml SNF 2011-04-29 08:50:33: ASML Time Message-ID: To Archive From gsosa at snf.stanford.edu Thu May 5 07:30:37 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 May 2011 07:30:37 -0700 Subject: Comment asml SNF 2011-05-03 09:51:19: ASML tool time till 4PM Message-ID: To Archive From lindaohara at snf.stanford.edu Thu May 5 09:51:30 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 5 May 2011 09:51:30 -0700 Subject: Comment asml SNF 2011-05-05 09:51:29: ASML Released Reservations 10:00-14:00 Message-ID: From gsosa at snf.stanford.edu Mon May 9 08:59:18 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 9 May 2011 08:59:18 -0700 Subject: Comment asml SNF 2011-05-09 08:59:18: Hotspots 5/9 Message-ID: 2 hotspots on test wafer( at 2 and 8 Oclock) , Cleaned the Echuck with tooling. Retest OK. From joho at snf.stanford.edu Tue May 10 09:23:25 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 10 May 2011 09:23:25 -0700 Subject: Comment asml SNF 2011-05-10 09:23:25: Starting MPM Message-ID: ASML is starting the MPM From joho at snf.stanford.edu Tue May 10 15:55:36 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 10 May 2011 15:55:36 -0700 Subject: Comment asml SNF 2011-05-10 15:55:35: Day 1 of the Monthly PM Completed Message-ID: Completed Day 1 of the Monthly PM. System ok for FRONT side only. Will continue with back side calibrations tomorrow. From gyama at snf.stanford.edu Thu May 12 12:45:00 2011 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 12 May 2011 12:45:00 -0700 Subject: Problem asml SNF 2011-05-12 12:44:59: CT not initialized Message-ID: failed start-up From gyama at snf.stanford.edu Thu May 12 12:47:27 2011 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 12 May 2011 12:47:27 -0700 Subject: Shutdown asml SNF 2011-05-12 12:47:26: failed CT routine Message-ID: From gsosa at snf.stanford.edu Thu May 12 13:54:23 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 12 May 2011 13:54:23 -0700 Subject: Shutdown asml SNF 2011-05-12 12:47:26: failed CT routine Message-ID: TCU went into safety mode. Nothing unusual in event log. Reset the TCU and did a full startup. All OK. From gsosa at snf.stanford.edu Thu May 12 13:54:30 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 12 May 2011 13:54:30 -0700 Subject: Problem asml SNF 2011-05-12 12:44:59: CT not initialized Message-ID: TCU went into safety mode. Nothing unusual in event log. Reset the TCU and did a full startup. All OK. From gsosa at snf.stanford.edu Fri May 13 09:40:25 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 13 May 2011 09:40:25 -0700 Subject: Comment asml SNF 2011-05-13 09:40:25: Hotspot 5/13 Message-ID: 2 hotspots 2 die in from major flat(left of center).Cleaned E-chuck with tooling. Retest OK. From gsosa at snf.stanford.edu Fri May 13 09:42:04 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 13 May 2011 09:42:04 -0700 Subject: Comment asml SNF 2011-05-13 09:42:03: ASML Reservations Released 5/13 Message-ID: ASML's reservations released for the remainder of the day. From mahnaz at snf.stanford.edu Mon May 16 09:15:22 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 16 May 2011 09:15:22 -0700 Subject: Comment asml SNF 2011-05-13 09:42:03: ASML Reservations Released 5/13 Message-ID: noted From mahnaz at snf.stanford.edu Mon May 16 09:15:44 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 16 May 2011 09:15:44 -0700 Subject: Comment asml SNF 2011-05-05 09:51:29: ASML Released Reservations 10:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Mon May 16 09:16:02 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 16 May 2011 09:16:02 -0700 Subject: Comment asml SNF 2011-05-04 14:14:13: ASML DEMO COMPLETE Message-ID: noted From mahnaz at snf.stanford.edu Mon May 16 09:16:24 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 16 May 2011 09:16:24 -0700 Subject: Comment asml SNF 2011-04-30 21:28:06: System Status 4/30 Message-ID: From gsosa at snf.stanford.edu Mon May 16 13:28:43 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 16 May 2011 13:28:43 -0700 Subject: Shutdown asml SNF 2011-05-16 13:28:43: Checking the exhaust Message-ID: From gsosa at snf.stanford.edu Mon May 16 14:46:30 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 16 May 2011 14:46:30 -0700 Subject: Shutdown asml SNF 2011-05-16 13:28:43: Checking the exhaust Message-ID: Had to shut the lamp off so that the exhaust fan could be shut off for servicing. Facilities gtoup repaired the low exhaust by replacing the fan belts. Exhaust is back to normal. Restarted and warmed up lamp. Checked uniformity//intensity- All OK. Checked IQC- All OK. System ready to use. From lindaohara at snf.stanford.edu Tue May 17 12:34:21 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 17 May 2011 12:34:21 -0700 Subject: Comment asml SNF 2011-05-17 12:34:21: ASML Released Reservations 13:00-14:00 Message-ID: From gsosa at snf.stanford.edu Wed May 18 11:00:55 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 18 May 2011 11:00:55 -0700 Subject: Comment asml SNF 2011-05-18 11:00:54: Reservations released 5/18 Message-ID: ASML Apps reservations released for the remainder of the day. Tool open for use. From lindaohara at snf.stanford.edu Thu May 19 08:27:57 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 19 May 2011 08:27:57 -0700 Subject: Comment asml SNF 2011-05-19 08:27:56: ASML Time Message-ID: From ysohn at snf.stanford.edu Thu May 19 18:40:45 2011 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Thu, 19 May 2011 18:40:45 -0700 Subject: Comment asml SNF 2011-05-19 18:40:44: 2 focus errors occured Message-ID: From kokab at snf.stanford.edu Sun May 22 23:42:55 2011 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Sun, 22 May 2011 23:42:55 -0700 Subject: Problem asml SNF 2011-05-22 23:42:54: Port 4 cover is broken Message-ID: I close it gently so I don't know I did this or it happened by previous user but now we cannot open this port after finishing the run. From gsosa at snf.stanford.edu Mon May 23 10:10:13 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 23 May 2011 10:10:13 -0700 Subject: Problem asml SNF 2011-05-22 23:42:54: Port 4 cover is broken Message-ID: Replaced broken hinges on port #3. From lindaohara at snf.stanford.edu Mon May 23 11:16:28 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 23 May 2011 11:16:28 -0700 Subject: Comment asml SNF 2011-05-23 11:16:27: Up for Frontside and Backside Alignment Message-ID: 3DAlign calibrations and verifications in spec. From gsosa at snf.stanford.edu Thu May 26 10:47:20 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 26 May 2011 10:47:20 -0700 Subject: Comment asml SNF 2011-05-26 10:47:20: Reservations released 5/26 Message-ID: ASML Apps. reservations released for the remainder of the day. Stepper available for use. From mahnaz at snf.stanford.edu Thu May 26 15:35:45 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 26 May 2011 15:35:45 -0700 Subject: Problem asml SNF 2011-04-21 09:39:51: Back side is about 10 um off Message-ID: I had reported while back that the back side alignment was off. We discovered that delta shift for WT marks was high and very unstable. So after extensive testing by ASML folks ... By switching from WT1 marker 2 to WT1 marker 3, the issue has been resolved. All the calibration are done and the BTBA overlay error are within the spec. Please note this is all about the system set up and has nothing to do with your pm marks. From mahnaz at snf.stanford.edu Thu May 26 15:36:03 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 26 May 2011 15:36:03 -0700 Subject: Comment asml SNF 2011-05-23 11:16:27: Up for Frontside and Backside Alignment Message-ID: From mahnaz at snf.stanford.edu Thu May 26 15:38:21 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 26 May 2011 15:38:21 -0700 Subject: Comment asml SNF 2011-05-19 08:27:56: ASML Time Message-ID: noted From mahnaz at snf.stanford.edu Thu May 26 15:38:32 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 26 May 2011 15:38:32 -0700 Subject: Comment asml SNF 2011-05-18 11:00:54: Reservations released 5/18 Message-ID: From mahnaz at snf.stanford.edu Thu May 26 15:38:39 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 26 May 2011 15:38:39 -0700 Subject: Comment asml SNF 2011-05-17 12:34:21: ASML Released Reservations 13:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Fri May 27 09:57:21 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 27 May 2011 09:57:21 -0700 Subject: Comment asml SNF 2011-05-27 09:57:21: ASML Released Reservations 10:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Tue May 31 10:21:57 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 31 May 2011 10:21:57 -0700 Subject: Comment asml SNF 2011-05-31 10:21:56: ASML Released Reservations 10:30-14:00 Message-ID: