Comment asml SNF 2011-10-04 16:10:41: system up
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Tue Oct 4 16:10:41 PDT 2011
The reticle loader has been replaced and part of the quarterly pm has been done.
ASML FSE will continue with the rest of pm tomorrow.
The system is up and ready to be used.
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