Comment asml SNF 2011-10-11 11:13:21: Hotspot 10/11/11 at 5 Oclock

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Oct 11 11:13:21 PDT 2011


Hotspot on  Right Bottom side  ( 5 Oclock )  Earlier this morning , Cleaned the
 E-chuck with tooling and retested. Re-test OK.




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