From gsosa at snf.stanford.edu Thu Sep 1 06:53:19 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:53:19 -0700 Subject: Comment asml SNF 2011-07-29 10:43:09: Hotspot Ck- 1 hotspot 7/29 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:53:24 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:53:24 -0700 Subject: Comment asml SNF 2011-08-01 10:10:11: Hotspot 8/1 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:53:30 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:53:30 -0700 Subject: Comment asml SNF 2011-08-02 12:24:19: Hotspot 8/2 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:53:34 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:53:34 -0700 Subject: Comment asml SNF 2011-08-03 13:19:16: ASML Released Reservations 13:30-16:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:53:40 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:53:40 -0700 Subject: Comment asml SNF 2011-08-04 12:32:58: Hotspot 8/4 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:53:46 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:53:46 -0700 Subject: Comment asml SNF 2011-08-05 08:46:51: Port 4 Hinges Broken Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:53:51 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:53:51 -0700 Subject: Comment asml SNF 2011-08-05 09:45:37: HOTSPOT CK, 2 HOTSPOTS Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:53:56 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:53:56 -0700 Subject: Comment asml SNF 2011-08-05 11:10:02: ASML Released Reservations 11:30-13:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:54:00 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:54:00 -0700 Subject: Comment asml SNF 2011-08-08 10:40:20: ASML Released Reservations 11:00-13:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:54:04 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:54:04 -0700 Subject: Comment asml SNF 2011-08-09 09:28:50: Hotspot 8/9 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:54:09 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:54:09 -0700 Subject: Comment asml SNF 2011-08-10 10:25:34: ASML Released Reservations 10:30-16:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:54:14 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:54:14 -0700 Subject: Comment asml SNF 2011-08-11 09:58:16: Hotspot 8/11 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:54:17 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:54:17 -0700 Subject: Comment asml SNF 2011-08-12 11:41:18: ASML Released Reservations 12:00-16:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:54:24 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:54:24 -0700 Subject: Comment asml SNF 2011-08-15 08:19:33: PM item completed Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:54:30 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:54:30 -0700 Subject: Comment asml SNF 2011-08-15 09:14:37: Reservations Release From 9:00AM to 11:00AM Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:54:34 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:54:34 -0700 Subject: Comment asml SNF 2011-08-17 09:10:05: HOTSPOT FOUND AT 11 OCLOCK TOP/ LEFT Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:54:39 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:54:39 -0700 Subject: Comment asml SNF 2011-08-18 14:38:21: ASML Released Reservations 15:00-16:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:54:43 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:54:43 -0700 Subject: Comment asml SNF 2011-08-18 14:43:54: Hotspots 8/18 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:54:48 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:54:48 -0700 Subject: Comment asml SNF 2011-08-30 10:52:22: Reservations Released 8/30 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Sep 1 06:54:54 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Sep 2011 06:54:54 -0700 Subject: Comment asml SNF 2011-08-31 10:17:15: ASML Released Reservations 11:00-14:00 Message-ID: To Archive From lindaohara at snf.stanford.edu Fri Sep 2 09:25:03 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 2 Sep 2011 09:25:03 -0700 Subject: Comment asml SNF 2011-09-02 09:25:03: ASML Released Reservations 10:00-14:00 Message-ID: From bchui at snf.stanford.edu Sat Sep 3 18:49:14 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 3 Sep 2011 18:49:14 -0700 Subject: Shutdown asml SNF 2011-09-03 18:49:14: Host wh-3628 unreachable Message-ID: I was running a couple of batches of wafers. The first batch ran fine. When I clicked "batch control" to start the 2nd batch, the machine froze up. A continuous stream of error messages flooded the log file screen until the log file was full. I tried "FAST STARTUP" but the machine gives an error message saying "Not all hosts are unreachable" and "Host wh-3628 unreachable". Since the machine is practically unusable in this state, I'm forced to shut it down. It would be much appreciated if staff could come in this weekend to reboot the machine so that users can use it on Sunday and Monday. From gsosa at snf.stanford.edu Sun Sep 4 13:23:51 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 4 Sep 2011 13:23:51 -0700 Subject: Shutdown asml SNF 2011-09-03 18:49:14: Host wh-3628 unreachable Message-ID: Wafer handling subsystem not communicating with the host computer. Reset the wafer handling electronics rack. Did full start-up of system to initialize all subsystems. Cycled 50+ wafers through the tool with batch job. All appears to be OK now. From bmcguirk at snf.stanford.edu Tue Sep 6 15:59:27 2011 From: bmcguirk at snf.stanford.edu (bmcguirk at snf.stanford.edu) Date: Tue, 6 Sep 2011 15:59:27 -0700 Subject: Comment asml SNF 2011-09-06 15:59:26: PM actions day one complete Message-ID: ALL, Several performance checks were completed today, but I restored the machine to it's original state before work started today. - Bert Mcguirk ASML From mahnaz at snf.stanford.edu Wed Sep 7 06:36:28 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 7 Sep 2011 06:36:28 -0700 Subject: Shutdown asml SNF 2011-09-07 06:36:27: lamp off, due to fan upgrade in litho area Message-ID: From lindaohara at snf.stanford.edu Thu Sep 8 16:11:20 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 8 Sep 2011 16:11:20 -0700 Subject: Shutdown asml SNF 2011-09-07 06:36:27: lamp off, due to fan upgrade in litho area Message-ID: Did Daily Quals, all in spec. Up and Okay to use From bmcguirk at snf.stanford.edu Fri Sep 9 15:47:25 2011 From: bmcguirk at snf.stanford.edu (bmcguirk at snf.stanford.edu) Date: Fri, 9 Sep 2011 15:47:25 -0700 Subject: Comment asml SNF 2011-09-09 15:47:24: PM work completed Message-ID: All, Completed all PM items except 3dalign section. System is currently ready for production and the 3d align test are scheduled to start at monday morning at 7 am. regards, Bert McGuirk & Mark Krifels ASML From bmcguirk at snf.stanford.edu Mon Sep 12 12:42:36 2011 From: bmcguirk at snf.stanford.edu (bmcguirk at snf.stanford.edu) Date: Mon, 12 Sep 2011 12:42:36 -0700 Subject: Comment asml SNF 2011-09-12 12:42:36: PM complete Message-ID: All, The final calibrations to 3dalign and front side marks have been completed, ASML system is ready for production. -Bert Mcguirk ASML Customer Support From lindaohara at snf.stanford.edu Fri Sep 16 11:41:42 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 16 Sep 2011 11:41:42 -0700 Subject: Comment asml SNF 2011-09-16 11:41:42: ASML Released Reservations 12:00-14:00 Message-ID: From bmcguirk at snf.stanford.edu Wed Sep 21 09:58:43 2011 From: bmcguirk at snf.stanford.edu (bmcguirk at snf.stanford.edu) Date: Wed, 21 Sep 2011 09:58:43 -0700 Subject: Comment asml SNF 2011-09-21 09:58:42: 3dalign training class Message-ID: We completed our lab work today. System is ready for SNF use. - Bert Mcguirk, ASML From lindaohara at snf.stanford.edu Wed Sep 21 10:08:53 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 21 Sep 2011 10:08:53 -0700 Subject: Comment asml SNF 2011-09-21 10:08:52: ASML Released Reservations 10:30-14:00 Message-ID: From elibol at snf.stanford.edu Wed Sep 21 23:27:23 2011 From: elibol at snf.stanford.edu (elibol at snf.stanford.edu) Date: Wed, 21 Sep 2011 23:27:23 -0700 Subject: Problem asml SNF 2011-09-21 23:27:22: ASML not responding Message-ID: Program got stuck while modifying a job and stopped responding. So we decided to exit (logoff) after trying all we can think of, now we can not log back on. Unless you know the login/password you will not be able to use the tool, I am not shutting it off in case you know it. I have my mask in the tool, if you could place it in the container I left and leave it near the reticle boxes I would appreciate it. From gsosa at snf.stanford.edu Thu Sep 22 06:34:43 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Sep 2011 06:34:43 -0700 Subject: Shutdown asml SNF 2011-09-22 06:34:42: System down Message-ID: From gsosa at snf.stanford.edu Thu Sep 22 08:59:21 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Sep 2011 08:59:21 -0700 Subject: Problem asml SNF 2011-09-21 23:27:22: ASML not responding Message-ID: Restarted the applications software. Did full start-up to initialize all subsystems- OK. Performed daily qualifications-All OK. Please do not hesitate to shut the tool down in Coral if there are problems with the tool and let the staff take the necessary corrective actions. This eliminates the the risk of potentially creating a bigger problem on a key lab processing tool. Thanks From gsosa at snf.stanford.edu Thu Sep 22 08:59:29 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Sep 2011 08:59:29 -0700 Subject: Shutdown asml SNF 2011-09-22 06:34:42: System down Message-ID: Restarted the applications software. Did full start-up to initialize all subsystems- OK. Performed daily qualifications-All OK. Please do not hesitate to shut the tool down in Coral if there are problems with the tool and let the staff take the necessary corrective actions. This eliminates the the risk of potentially creating a bigger problem on a key lab processing tool. Thanks From gsosa at snf.stanford.edu Fri Sep 23 15:33:42 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Sep 2011 15:33:42 -0700 Subject: Comment asml SNF 2011-09-23 15:33:41: Hotspot 9/23 Message-ID: Hotspot on left side of major flat this morning. Cleaned the E-chuck with tooling and retested. Re-test OK. From lindaohara at snf.stanford.edu Tue Sep 27 13:31:46 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 27 Sep 2011 13:31:46 -0700 Subject: Comment asml SNF 2011-09-27 13:31:46: ASML Released Reservations 14:00-16:00 Message-ID: From gsosa at snf.stanford.edu Wed Sep 28 11:42:56 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 28 Sep 2011 11:42:56 -0700 Subject: Comment asml SNF 2011-09-28 11:42:55: Hotspot 9/28 Message-ID: Hotspot in center of wafer. Cleaned E-chuck with tooling. re-test OK. From lindaohara at snf.stanford.edu Thu Sep 29 11:59:17 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 29 Sep 2011 11:59:17 -0700 Subject: Comment asml SNF 2011-09-29 11:59:17: ASML Released Reservations 12:00-14:00 Message-ID: