Shutdown asml SNF 2011-09-03 18:49:14: Host wh-3628 unreachable

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sun Sep 4 13:23:51 PDT 2011


Wafer handling subsystem not communicating with the host computer. Reset the wafer handling electronics rack. Did full start-up of system to initialize all subsystems. Cycled 50+ wafers through the tool with batch job. All appears to be OK now.




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