Problem asml SNF 2011-09-21 23:27:22: ASML not responding

[gsosa at snf.stanford.edu]

Restarted the applications software. Did full start-up to initialize all subsystems- OK.  Performed daily qualifications-All OK.  Please do not hesitate to shut the tool down in Coral if there are problems with the tool and let the staff take the necessary corrective actions. This eliminates the the risk of potentially creating a bigger problem on a key lab processing tool. Thanks