Problem asml SNF 2011-09-21 23:27:22: ASML not responding

gsosa at gsosa at
Thu Sep 22 08:59:21 PDT 2011

Restarted the applications software. Did full start-up to initialize all subsystems- OK.  Performed daily qualifications-All OK.  Please do not hesitate to shut the tool down in Coral if there are problems with the tool and let the staff take the necessary corrective actions. This eliminates the the risk of potentially creating a bigger problem on a key lab processing tool. Thanks

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