From lindaohara at snf.stanford.edu Mon Apr 2 10:55:46 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 2 Apr 2012 10:55:46 -0700 Subject: Comment asml SNF 2012-04-02 10:55:45: ASML is also up for 3D Align Message-ID: ASML is also up for 3D align. From lindaohara at snf.stanford.edu Mon Apr 2 10:56:13 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 2 Apr 2012 10:56:13 -0700 Subject: Problem asml SNF 2012-03-28 11:42:34: 3D is down Message-ID: 3D align is up From lindaohara at snf.stanford.edu Mon Apr 2 10:56:46 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 2 Apr 2012 10:56:46 -0700 Subject: Problem asml SNF 2012-03-30 18:31:02: energy sensor temperature out of range errors Message-ID: ok to use, Software bug From lindaohara at snf.stanford.edu Tue Apr 3 11:07:10 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 3 Apr 2012 11:07:10 -0700 Subject: Comment asml SNF 2012-04-03 11:07:09: ASML Released Reservations 11:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Wed Apr 4 09:08:43 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 4 Apr 2012 09:08:43 -0700 Subject: Comment asml SNF 2012-04-04 09:08:43: ASML Released Reservations 9:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Apr 5 11:25:38 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 5 Apr 2012 11:25:38 -0700 Subject: Comment asml SNF 2012-04-05 11:25:37: ASML Released Reservations 12:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Tue Apr 10 13:05:42 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 10 Apr 2012 13:05:42 -0700 Subject: Comment asml SNF 2012-04-10 13:05:41: Okay to use ASML to 14:00 Message-ID: From lindaohara at snf.stanford.edu Wed Apr 11 08:49:10 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 11 Apr 2012 08:49:10 -0700 Subject: Shutdown asml SNF 2012-04-11 08:49:10: Wafer Stage won't Initialize Message-ID: ASML CSE is coming in around 10:00a Linda Ohara ASML From gsosa at snf.stanford.edu Wed Apr 11 11:14:36 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Apr 2012 11:14:36 -0700 Subject: Shutdown asml SNF 2012-04-11 08:49:10: Wafer Stage won't Initialize Message-ID: ASM-L vendors checked and adjusted reciever voltages on both X and Y axis. Stage initialized OK. IQC test OK. Vendors to follow up by checking the laser intensity and prepare for a possible laser change. System OK to use now. From lindaohara at snf.stanford.edu Wed Apr 11 13:00:07 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 11 Apr 2012 13:00:07 -0700 Subject: Comment asml SNF 2012-04-11 13:00:06: ASML Time Available until 14:00 Message-ID: From gsosa at snf.stanford.edu Wed Apr 11 13:19:28 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Apr 2012 13:19:28 -0700 Subject: Comment asml SNF 2012-04-11 13:19:28: Hotspots 4/11 Message-ID: 2 hotspots on test wafer near major flat. Cleaned the E-chuck. Retest OK. From lindaohara at snf.stanford.edu Thu Apr 12 12:08:20 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 12 Apr 2012 12:08:20 -0700 Subject: Comment asml SNF 2012-04-12 12:08:20: Okay to use ASML Reservations until 14:00 Message-ID: From zguo at snf.stanford.edu Thu Apr 12 12:21:36 2012 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Thu, 12 Apr 2012 12:21:36 -0700 Subject: Shutdown asml SNF 2012-04-12 12:21:36: wafer stack inside Message-ID: From lindaohara at snf.stanford.edu Thu Apr 12 13:29:47 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 12 Apr 2012 13:29:47 -0700 Subject: Shutdown asml SNF 2012-04-12 12:21:36: wafer stack inside Message-ID: Eric, ASML CSE recovered the wafer on E-Chuck. and did a full start up. Cycled a wafer through okay. Up and olay to use. From lindaohara at snf.stanford.edu Fri Apr 13 11:57:39 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 13 Apr 2012 11:57:39 -0700 Subject: Shutdown asml SNF 2012-04-13 11:57:39: Wafer Stage won't go in Message-ID: Wafer Stage won't go in, Eric & Chris, ASML CSEs are working on the problem From lindaohara at snf.stanford.edu Fri Apr 13 12:10:38 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 13 Apr 2012 12:10:38 -0700 Subject: Comment asml SNF 2012-04-13 12:10:37: Hotspot ck, 1 at 3:00 o'clock position Message-ID: Found 1 hotspot at 3:00 o'clock. Eric, ASML CSE cleaned the E-Chuck and hotspot ck ok, no hotspots. From lindaohara at snf.stanford.edu Fri Apr 13 14:04:58 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 13 Apr 2012 14:04:58 -0700 Subject: Shutdown asml SNF 2012-04-13 11:57:39: Wafer Stage won't go in Message-ID: Chris & Eric, ASML CSEs put the stage in. Initialized stage and did a full start up. IQC ok. ASML ok to use. From gsosa at snf.stanford.edu Mon Apr 16 09:38:46 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 16 Apr 2012 09:38:46 -0700 Subject: Shutdown asml SNF 2012-04-16 09:38:46: Scheduled Downtime 4/16 Message-ID: Vendors are here to investigate the purge hood height, From gsosa at snf.stanford.edu Mon Apr 16 15:42:21 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 16 Apr 2012 15:42:21 -0700 Subject: Shutdown asml SNF 2012-04-16 09:38:46: Scheduled Downtime 4/16 Message-ID: Vendors completed scheduled work. Stepper OK to use. From lindaohara at snf.stanford.edu Tue Apr 17 10:15:30 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 17 Apr 2012 10:15:30 -0700 Subject: Shutdown asml SNF 2012-04-17 10:15:30: ASML Monthly PM Message-ID: From gsosa at snf.stanford.edu Tue Apr 17 16:06:44 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 17 Apr 2012 16:06:44 -0700 Subject: Shutdown asml SNF 2012-04-17 10:15:30: ASML Monthly PM Message-ID: Day 1 of monthly PM completed. Tool is up and ready for use. From maxms at snf.stanford.edu Tue Apr 17 18:08:17 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Tue, 17 Apr 2012 18:08:17 -0700 Subject: Shutdown asml SNF 2012-04-17 18:08:16: wafers stuck Message-ID: From gsosa at snf.stanford.edu Wed Apr 18 15:03:11 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 18 Apr 2012 15:03:11 -0700 Subject: Shutdown asml SNF 2012-04-17 18:08:16: wafers stuck Message-ID: Users wafers recovered from system. ASML continued with customer training and scheduled PM. Daily quals OK. System ready to use. From gsosa at snf.stanford.edu Thu Apr 19 08:31:56 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 19 Apr 2012 08:31:56 -0700 Subject: Shutdown asml SNF 2012-04-19 08:31:55: Scheduled Downtime 4/19 Message-ID: ASML continuing on Monthly PM and replacing rotary unit( for stone in/out function) From gsosa at snf.stanford.edu Thu Apr 19 16:30:33 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 19 Apr 2012 16:30:33 -0700 Subject: Shutdown asml SNF 2012-04-19 16:30:32: System is Down 4/19 Message-ID: The vendors from ASML repaired the rotary unit that swings the X/Y stage in and out. The tool was open for most of the day and will need to stabilize overnight before any critical setups can be done. ASML will continue working on the tool tomorrow morning. From gsosa at snf.stanford.edu Fri Apr 20 17:10:19 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Apr 2012 17:10:19 -0700 Subject: Shutdown asml SNF 2012-04-19 16:30:32: System is Down 4/19 Message-ID: Vendor completed PM for frontside align only. FEM and red/blue completed and new reference state defined for IQC test. E-chuck cleaned with tooling. Daily tests completed- Uniformity and focus good. 3D alignment system to ba calibrated at a later date. UP FOR FRONTIDE ALIGNMENT ONLY. From gsosa at snf.stanford.edu Fri Apr 20 17:10:41 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Apr 2012 17:10:41 -0700 Subject: Shutdown asml SNF 2012-04-19 08:31:55: Scheduled Downtime 4/19 Message-ID: Vendor completed PM for frontside align only. FEM and red/blue completed and new reference state defined for IQC test. E-chuck cleaned with tooling. Daily tests completed- Uniformity and focus good. 3D alignment system to ba calibrated at a later date. UP FOR FRONTIDE ALIGNMENT ONLY. From gsosa at snf.stanford.edu Fri Apr 20 17:11:24 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Apr 2012 17:11:24 -0700 Subject: Problem asml SNF 2012-04-20 17:11:23: Frontside align only 4/20 Message-ID: Vendor completed PM for frontside align only. FEM and red/blue completed and new reference state defined for IQC test. E-chuck cleaned with tooling. Daily tests completed- Uniformity and focus good. 3D alignment system to ba calibrated at a later date. UP FOR FRONTIDE ALIGNMENT ONLY. From eperalta at snf.stanford.edu Fri Apr 20 21:25:21 2012 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Fri, 20 Apr 2012 21:25:21 -0700 Subject: Problem asml SNF 2012-04-20 21:25:21: batch did not finish due to system error Message-ID: SRD'd all 6 wafers before processing Last wafer did not expose. The wafer was not rejected, the system simply refused to expose after the first 9 images were exposed. I removed those 9 images from the job definition to force the tool to start exposing at the 10th image but it simply wouldnt. These are the errors (in chronological order) that i saw on the command line: WS-6000 WS-1000 LC-0001 EC-0001 IL-0601 IL-470a IL-0e0a IL-001 EC-0001 BC-0000 BC-00103 Tested the wafer flatness after removing them and the 6th one performed very poorly. However, a few other's didn't do too well and the system still exposed them with no problem. From cbellew at snf.stanford.edu Sun Apr 22 11:28:15 2012 From: cbellew at snf.stanford.edu (cbellew at snf.stanford.edu) Date: Sun, 22 Apr 2012 11:28:15 -0700 Subject: Shutdown asml SNF 2012-04-22 11:28:14: Wafers stuck in tool Message-ID: I was trying to expose three wafers. The first two made it through without problems. The third wafer disappeared from the status monitor during the move from P chuck to E chuck. When I tried to clear the batch from the tool, it showed up as red on the E chuck. When I tried to reinitialize the wafer handling, it said there was a risk to the wafers due to an unsafe situation and that the wafers would need to be removed manually. There is a box by the reticle exchange station into which the wafers can be placed. Sorry. From gsosa at snf.stanford.edu Mon Apr 23 09:37:37 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 23 Apr 2012 09:37:37 -0700 Subject: Shutdown asml SNF 2012-04-23 09:37:36: Failed IQC Test 4/23 Message-ID: IQC test failed for high translation in X and Y. Vendor coming in to address the problem. From gsosa at snf.stanford.edu Mon Apr 23 09:38:06 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 23 Apr 2012 09:38:06 -0700 Subject: Shutdown asml SNF 2012-04-22 11:28:14: Wafers stuck in tool Message-ID: Retrieved the wafers stuck in the system. From gsosa at snf.stanford.edu Mon Apr 23 16:13:44 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 23 Apr 2012 16:13:44 -0700 Subject: Shutdown asml SNF 2012-04-23 09:37:36: Failed IQC Test 4/23 Message-ID: Vendor checked BMC's and performed Red/Blue test. All in spec. New reference state defined. IQC test OK. Please continue to report problems or unusual system behavior. From bchui at snf.stanford.edu Tue Apr 24 17:43:46 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 24 Apr 2012 17:43:46 -0700 Subject: Comment asml SNF 2012-04-24 17:43:45: When will BSA be up? Message-ID: Does someone have an ETA as to when BSA (3D) will be up? Thanks! From gsosa at snf.stanford.edu Wed Apr 25 07:36:01 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:36:01 -0700 Subject: Comment asml SNF 2012-03-22 15:16:38: Monthly PM completed 3/22 Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:36:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:36:07 -0700 Subject: Comment asml SNF 2012-03-20 15:35:19: Update 3/20 Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:36:13 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:36:13 -0700 Subject: Comment asml SNF 2012-03-22 15:17:30: Up for front and backside align Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:36:18 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:36:18 -0700 Subject: Comment asml SNF 2012-03-23 09:32:58: Hotspots 3/23 Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:36:22 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:36:22 -0700 Subject: Comment asml SNF 2012-03-25 09:20:58: System Up 3/.25 Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:36:28 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:36:28 -0700 Subject: Comment asml SNF 2012-03-27 10:47:42: ASML Released Reservations 11:00-14:00 Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:36:33 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:36:33 -0700 Subject: Comment asml SNF 2012-03-29 15:39:09: Hotspot ck Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:36:58 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:36:58 -0700 Subject: Comment asml SNF 2012-03-30 08:09:59: Doing 3D Calibration Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:37:16 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:37:16 -0700 Subject: Comment asml SNF 2012-03-30 14:17:22: Up for use Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:37:58 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:37:58 -0700 Subject: Comment asml SNF 2012-04-02 10:55:45: ASML is also up for 3D Align Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:38:07 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:38:07 -0700 Subject: Comment asml SNF 2012-04-03 11:07:09: ASML Released Reservations 11:00-14:00 Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:38:11 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:38:11 -0700 Subject: Comment asml SNF 2012-04-04 09:08:43: ASML Released Reservations 9:30-14:00 Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:38:24 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:38:24 -0700 Subject: Comment asml SNF 2012-04-05 11:25:37: ASML Released Reservations 12:00-14:00 Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:51:11 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:51:11 -0700 Subject: Comment asml SNF 2012-04-10 13:05:41: Okay to use ASML to 14:00 Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:51:19 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:51:19 -0700 Subject: Comment asml SNF 2012-04-11 13:00:06: ASML Time Available until 14:00 Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:51:24 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:51:24 -0700 Subject: Comment asml SNF 2012-04-11 13:19:28: Hotspots 4/11 Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:51:29 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:51:29 -0700 Subject: Comment asml SNF 2012-04-12 12:08:20: Okay to use ASML Reservations until 14:00 Message-ID: To archive From gsosa at snf.stanford.edu Wed Apr 25 07:51:38 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:51:38 -0700 Subject: Comment asml SNF 2012-04-13 12:10:37: Hotspot ck, 1 at 3:00 o'clock position Message-ID: To archive From gsosa at snf.stanford.edu Thu Apr 26 15:55:45 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 26 Apr 2012 15:55:45 -0700 Subject: Comment asml SNF 2012-04-26 15:55:45: Hotspots 4/26 Message-ID: Hotspots on test wafer this morning. Cleaned the E-chuck with tooling. Retest OK. From alsune at snf.stanford.edu Fri Apr 27 00:28:07 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 27 Apr 2012 00:28:07 -0700 Subject: Shutdown asml SNF 2012-04-27 00:28:06: Wafer stuck in the exposure chuck Message-ID: Wafer is stuck in the exposure chuck. I've tried to recover it, but every measure I've tried don't work. I've followed the standard cleaning procedure, including the SRD clean before the wafer loading. Sorry for the inconvenience. From gsosa at snf.stanford.edu Fri Apr 27 09:25:44 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 27 Apr 2012 09:25:44 -0700 Subject: Shutdown asml SNF 2012-04-27 00:28:06: Wafer stuck in the exposure chuck Message-ID: Recovered wafer from E-chuck. Inspected wafer- All looks OK. System reported an e-pins vacuum error. Rettried users wafer with handling test. wafer transfered OK through-out handling system. From lindaohara at snf.stanford.edu Fri Apr 27 09:59:12 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 27 Apr 2012 09:59:12 -0700 Subject: Comment asml SNF 2012-04-27 09:59:12: Hotspot CK Message-ID: Hotspot found at lower left corner, Eric (ASML CSE) cleaned E-Chuck and no hotspots. From gsosa at snf.stanford.edu Fri Apr 27 15:09:01 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 27 Apr 2012 15:09:01 -0700 Subject: Shutdown asml SNF 2012-04-27 15:09:00: Tool Shutdown 4/27 Message-ID: The tool is shutdown and unavailable to labmembers. There is an unidentified problem within the exposure area that is causing damage to the alignment targets located on the 3D align wafer table. There is also noticable damage to optical surfaces located on top of the mirror block assembly and at least 1 window on the purge hood assembly. We are shutting down the tool to prevent further damage. ASML will be in on Monday(4/30) to begin an investigation as to the cause of this problem. From gsosa at snf.stanford.edu Mon Apr 30 17:06:05 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 30 Apr 2012 17:06:05 -0700 Subject: Comment asml SNF 2012-04-30 17:06:05: Update 4/30 Message-ID: System is still down. ASML Vendors removed the purge hood and replaced the wafer table. vendors checked and updated basic machine constants for critical alignmnet positions and began metrology setup. They will continue with the metrology setup tomorrow.