Shutdown asml SNF 2012-04-11 08:49:10: Wafer Stage won't Initialize

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Apr 11 11:14:36 PDT 2012


ASM-L vendors checked and adjusted reciever voltages on both  X and Y axis. Stage initialized OK. IQC  test OK. Vendors to follow up by checking the laser intensity and prepare for a possible laser change. System OK to use now.




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