Shutdown asml SNF 2012-04-12 12:21:36: wafer stack inside

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Thu Apr 12 13:29:47 PDT 2012


Eric, ASML CSE recovered the wafer on E-Chuck. and did a full start up. 
Cycled a wafer through okay. Up and olay to use.




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