Comment asml SNF 2012-04-13 12:10:37: Hotspot ck, 1 at 3:00 o'clock position

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Fri Apr 13 12:10:38 PDT 2012


Found 1 hotspot at 3:00 o'clock. Eric, ASML CSE cleaned the E-Chuck and hotspot ck ok, no hotspots.




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