Comment asml SNF 2012-04-13 12:10:37: Hotspot ck, 1 at 3:00 o'clock position

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Fri Apr 13 12:10:38 PDT 2012

Previous message: Shutdown asml SNF 2012-04-13 11:57:39: Wafer Stage won't go in
Next message: Comment asml SNF 2012-04-13 12:10:37: Hotspot ck, 1 at 3:00 o'clock position
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Found 1 hotspot at 3:00 o'clock. Eric, ASML CSE cleaned the E-Chuck and hotspot ck ok, no hotspots.

Previous message: Shutdown asml SNF 2012-04-13 11:57:39: Wafer Stage won't go in
Next message: Comment asml SNF 2012-04-13 12:10:37: Hotspot ck, 1 at 3:00 o'clock position
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the asml-pcs mailing list