Shutdown asml SNF 2012-04-13 11:57:39: Wafer Stage won't go in

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Fri Apr 13 14:04:58 PDT 2012

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Chris & Eric, ASML CSEs put the stage in. Initialized stage and did a full start up. IQC ok. ASML ok to use.

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