Shutdown asml SNF 2012-04-19 16:30:32: System is Down 4/19

gsosa at gsosa at
Thu Apr 19 16:30:33 PDT 2012

The vendors from ASML repaired the rotary unit that swings the X/Y stage in and out. The tool was open for most of the day and will need to stabilize overnight before any critical setups can be done. ASML will continue working on the tool tomorrow morning.

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