Shutdown asml SNF 2012-04-19 16:30:32: System is Down 4/19

[gsosa at snf.stanford.edu]

Vendor completed PM for frontside align only. FEM and red/blue completed and new reference state defined for IQC test.  E-chuck cleaned with tooling. Daily tests completed- Uniformity and focus good. 3D alignment system to ba calibrated at a later date. UP FOR FRONTIDE ALIGNMENT ONLY.