Problem asml SNF 2012-04-20 17:11:23: Frontside align only 4/20

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Apr 20 17:11:24 PDT 2012


Vendor completed PM for frontside align only. FEM and red/blue completed and new reference state defined for IQC test.  E-chuck cleaned with tooling. Daily tests completed- Uniformity and focus good. 3D alignment system to ba calibrated at a later date. UP FOR FRONTIDE ALIGNMENT ONLY.




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