Comment asml SNF 2012-04-26 15:55:45: Hotspots 4/26

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Apr 26 15:55:45 PDT 2012

Previous message: Comment asml SNF 2012-03-30 14:17:22: Up for use
Next message: Shutdown asml SNF 2012-04-27 00:28:06: Wafer stuck in the exposure chuck
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Hotspots on test wafer this morning. Cleaned the E-chuck with tooling. Retest OK.

Previous message: Comment asml SNF 2012-03-30 14:17:22: Up for use
Next message: Shutdown asml SNF 2012-04-27 00:28:06: Wafer stuck in the exposure chuck
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the asml-pcs mailing list