Shutdown asml SNF 2012-04-27 00:28:06: Wafer stuck in the exposure chuck

alsune at snf.stanford.edu alsune at snf.stanford.edu
Fri Apr 27 00:28:07 PDT 2012


Wafer is stuck in the exposure chuck. I've tried to recover it, but every measure I've tried don't work. I've followed the standard cleaning procedure, including the SRD clean before the wafer loading. Sorry for the inconvenience.




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