Shutdown asml SNF 2012-04-27 00:28:06: Wafer stuck in the exposure chuck

alsune at alsune at
Fri Apr 27 00:28:07 PDT 2012

Wafer is stuck in the exposure chuck. I've tried to recover it, but every measure I've tried don't work. I've followed the standard cleaning procedure, including the SRD clean before the wafer loading. Sorry for the inconvenience.

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