Shutdown asml SNF 2012-04-27 00:28:06: Wafer stuck in the exposure chuck

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Apr 27 09:25:44 PDT 2012


Recovered wafer from E-chuck. Inspected wafer- All looks OK. System reported an e-pins vacuum error. Rettried users wafer with handling test. wafer transfered OK through-out handling system.




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