Shutdown asml SNF 2012-04-27 15:09:00: Tool Shutdown 4/27

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Apr 27 15:09:01 PDT 2012


The tool is shutdown and unavailable to labmembers. There is an unidentified problem within the exposure area that is causing damage to the alignment targets located on the 3D align wafer table. There is also noticable damage to optical surfaces located on top of the mirror block assembly and at least 1 window on the purge hood assembly. We are shutting down the tool to prevent further damage. ASML will be in on Monday(4/30) to begin an investigation as to the cause of this problem. 




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