Comment asml SNF 2012-04-30 17:06:05: Update 4/30

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Apr 30 17:06:05 PDT 2012


System is still down. ASML Vendors removed the purge hood and replaced the wafer table. vendors checked and updated basic machine constants for critical alignmnet positions and began metrology setup. They will continue with the metrology setup tomorrow.




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