From lindaohara at snf.stanford.edu  Wed Aug  1 11:48:41 2012
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Wed, 1 Aug 2012 11:48:41 -0700
Subject: Comment asml SNF 2012-08-01 11:48:40: ASML Released Reservations 12:00-14:00
Message-ID: <mailman.2491.1356281048.3396.asml-pcs@snf.stanford.edu>




From maxms at snf.stanford.edu  Wed Aug  1 19:32:55 2012
From: maxms at snf.stanford.edu (maxms at snf.stanford.edu)
Date: Wed, 1 Aug 2012 19:32:55 -0700
Subject: Shutdown asml SNF 2012-08-01 19:32:54: latch broken - wafer inside
Message-ID: <mailman.2492.1356281048.3396.asml-pcs@snf.stanford.edu>

My single wafer is inside, and is not lost in the machine, but it will not remove it.  I have spoken with Mahnaz already (welcome back, btw), and it sounds like the latch on the cassette hood is broken, since it keeps saying the hood is not closed.  my wafer box and mask holder are both on ASML for the morning...
Thanks, and sorry for any delay in your processing,
Max



From gsosa at snf.stanford.edu  Thu Aug  2 09:51:55 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 2 Aug 2012 09:51:55 -0700
Subject: Shutdown asml SNF 2012-08-01 19:32:54: latch broken - wafer inside
Message-ID: <mailman.2493.1356281048.3396.asml-pcs@snf.stanford.edu>

Recovered users wafer. Reset the system software. Re-initialized all hardware. Performed daily quals.



From lindaohara at snf.stanford.edu  Thu Aug  2 11:08:44 2012
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Thu, 2 Aug 2012 11:08:44 -0700
Subject: Comment asml SNF 2012-08-02 11:08:44: ASML Released Reservations 11:30-14:00
Message-ID: <mailman.2494.1356281048.3396.asml-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Fri Aug  3 08:56:38 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 3 Aug 2012 08:56:38 -0700
Subject: Comment asml SNF 2012-08-03 08:56:37: HotSpot Found, Cleaned E chuck and tested, Ok to use 
Message-ID: <mailman.2495.1356281048.3396.asml-pcs@snf.stanford.edu>

HotSpot Found, Cleaned E chuck and tested, Ok to use



From cchen86 at snf.stanford.edu  Sun Aug  5 23:48:09 2012
From: cchen86 at snf.stanford.edu (cchen86 at snf.stanford.edu)
Date: Sun, 5 Aug 2012 23:48:09 -0700
Subject: Problem asml SNF 2012-08-05 23:48:08: initial handle check failed on port #4
Message-ID: <mailman.2496.1356281048.3396.asml-pcs@snf.stanford.edu>