Shutdown asml SNF 2012-08-01 19:32:54: latch broken - wafer inside

maxms at snf.stanford.edu maxms at snf.stanford.edu
Wed Aug 1 19:32:55 PDT 2012


My single wafer is inside, and is not lost in the machine, but it will not remove it.  I have spoken with Mahnaz already (welcome back, btw), and it sounds like the latch on the cassette hood is broken, since it keeps saying the hood is not closed.  my wafer box and mask holder are both on ASML for the morning...
Thanks, and sorry for any delay in your processing,
Max




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