Comment asml SNF 2012-08-02 11:08:44: ASML Released Reservations 11:30-14:00
lindaohara at snf.stanford.edu
lindaohara at snf.stanford.edu
Thu Aug 2 11:08:44 PDT 2012
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Shutdown asml SNF 2012-08-01 19:32:54: latch broken - wafer inside
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Comment asml SNF 2012-08-03 08:56:37: HotSpot Found, Cleaned E chuck and tested, Ok to use
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Shutdown asml SNF 2012-08-01 19:32:54: latch broken - wafer inside
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Comment asml SNF 2012-08-03 08:56:37: HotSpot Found, Cleaned E chuck and tested, Ok to use
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