From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-06 09:49:45: Hotspot 8/6 Message-ID: <5832210.14.1344271785747.JavaMail.coral@shine> Small hotspot at major flat. Cleaned with tooling. Retest OK. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-08-05 23:48:08: initial handle check failed on port #4 Message-ID: <23074105.19.1344288058176.JavaMail.coral@shine> Wafer handling tested during morning quals. All Tested OK. From alsune at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-07 00:36:54: Wafer stuck in the machine Message-ID: <29689123.39.1344325015033.JavaMail.coral@shine> After loading the wafer and running the job file,wafer got stuck in the exposure chuck.The wafer was coated with 1.0um 3612 and it went through the SRD before going in. Sorry for the inconvenience. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-07 00:36:54: Wafer stuck in the machine Message-ID: <26090693.49.1344356745989.JavaMail.coral@shine> Removed users wafer from the E-chuck. Cleaned the E-chuck for GP. Performed daily qual. All OK From junam at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-08 03:12:21: wafer stuck on p chuck Message-ID: <32886905.62.1344420741955.JavaMail.coral@shine> while running my first wafer, the robot arm moved the wafer from LL to p-chuck, and "system error" occurred. I pressed "remove wafer from machine," and then on the system screen, the wafer on the p-chuck dissappeared, but did not come out. Probably the wafer is still on the p-chuck. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-08 03:12:21: wafer stuck on p chuck Message-ID: <12772061.68.1344444720497.JavaMail.coral@shine> Recovered users wafer from the pre-aligner. Re-initialized system hardware. Performed daily quals. Tool functioning normally. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-08 09:53:37: Hotspot 8/8 Message-ID: <6045792.69.1344444817457.JavaMail.coral@shine> Hotspot on test wafer near center/left. Cleaned the E-chuck with tooling. Retest OK. From alsune at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-10 00:41:25: Wafer stuck again Message-ID: <25536121.120.1344584485793.JavaMail.coral@shine> I'm sorry to do this again, but the wafer got stuck again in the asml. It was the second attempt after removing the backside Ge as much as I could. It slided better on the granite table than the last time, but it failed again. Again, sorry and I will dispose this wafer and begin from scratch. -Wooshik From vilanova at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-10 00:41:25: Wafer stuck again Message-ID: <25171790.123.1344613382001.JavaMail.coral@shine> Removed Stranded User Wafer, Found Hotspot During Daily Quals Cleaned E chuck With Tooling tested System , All Operations Ok Good to use From vilanova at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-10 09:30:03: Hotspots Found for the las 4 days Message-ID: <5761718.124.1344616204707.JavaMail.coral@shine> We've been finding A lot of Hotspots this week for the last 4 days We've been cleaning the chuck, Inspect your wafers Before You run them through ASML and please Dont forget to Run them through the SRD before Run them On the ASML . From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-14 15:29:54: ASML QPM Day 1 completed Message-ID: <29959154.44.1344983394759.JavaMail.coral@shine> QPM Day 1 completed, released for SNF to use. From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-15 16:01:40: ASML QPM Day 2 completed Message-ID: <5683070.60.1345071700805.JavaMail.coral@shine> QPM Day 2 completed, released for SNF to use. From vilanova at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-17 08:28:57: Found A Hotspot , CleANED E chuck,, tested Ok to use. Message-ID: <11876701.114.1345217337805.JavaMail.coral@shine> Found A Hotspot ( Bottom Flat of wafer ) , CleANED E chuck,, tested Ok to use. PLEASE MAKE SURE THE BACK OF THE WAFERS ARE CLEAN BEFORE THEY GO INTO THE ASML, . From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-17 11:39:12: ASML Released Reservations 12:00-14:00 Message-ID: <28270974.129.1345228752599.JavaMail.coral@shine> From mahnaz at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-17 15:43:04: ws temp. out of range Message-ID: <15410753.150.1345243384762.JavaMail.coral@shine> From mahnaz at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-17 16:02:48: temp going up, not having enough information Message-ID: <20602936.155.1345244569204.JavaMail.coral@shine> powered the lamp and totally shut down the stepper. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-19 14:03:53: status 8/19 Message-ID: <22860959.0.1345410234297.JavaMail.coral@shine> Powered up tool at 1:00PM. Re-initialized all hardware-OK. System is in stabilizing phase until tomorrow morning. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-20 15:52:26: Still Down 8/20/2012 Message-ID: <30113760.48.1345503146841.JavaMail.coral@shine> The stepper is still stabilizing. We are going to alllow it to stabilize overnight to fully recover. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-07-19 14:06:03: ASML Released Reservations 14:30-16:00 Message-ID: <31148277.49.1345503190260.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-07-24 11:10:17: ASML Released Reservatins 11:30-14:00 Message-ID: <26679844.50.1345503196329.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-07-26 10:32:09: ASML Released Reservations 11:00-14:00 Message-ID: <5729085.51.1345503201386.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-07-31 15:01:47: ASMl Released Reservations 15:00-16:00 Message-ID: <31704979.52.1345503206444.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-01 11:48:40: ASML Released Reservations 12:00-14:00 Message-ID: <28727088.53.1345503213514.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-02 11:08:44: ASML Released Reservations 11:30-14:00 Message-ID: <7491345.54.1345503220592.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-07-10 09:30:21: Hotspot Message-ID: <10893330.55.1345503234741.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-07-13 12:13:37: ASML Released Reservations 12:30-14:00 Message-ID: <27207260.56.1345503240809.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-07-16 10:20:07: HotSpot Found, Cleaned E chuck and tested, Ok to use Message-ID: <10207455.57.1345503263028.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-06 09:49:45: Hotspot 8/6 Message-ID: <8291269.58.1345503268077.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-17 15:43:04: ws temp. out of range Message-ID: <13968093.22.1345583993510.JavaMail.coral@shine> System shutdown over the weekend due to process cooling water problems. System started up on Monday 8/20/2012 and allowed to stabilize for 24 hours. IQC test indicated very large X and Y tilts beyond the allowable update range. Performed White Light Focus and Tilt to Tilt matching. Updated all critical parameters in machine constants and redefined the system reference state. Performed daily qual. All data in spec. Hotspot test good. System OK to use. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-17 16:02:48: temp going up, not having enough information Message-ID: <27273229.23.1345584000580.JavaMail.coral@shine> System shutdown over the weekend due to process cooling water problems. System started up on Monday 8/20/2012 and allowed to stabilize for 24 hours. IQC test indicated very large X and Y tilts beyond the allowable update range. Performed White Light Focus and Tilt to Tilt matching. Updated all critical parameters in machine constants and redefined the system reference state. Performed daily qual. All data in spec. Hotspot test good. System OK to use. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-21 14:20:29: System Up 8/21 Message-ID: <6575534.24.1345584029778.JavaMail.coral@shine> System shutdown over the weekend due to process cooling water problems. System started up on Monday 8/20/2012 and allowed to stabilize for 24 hours. IQC test indicated very large X and Y tilts beyond the allowable update range. Performed White Light Focus and Tilt to Tilt matching. Updated all critical parameters in machine constants and redefined the system reference state. Performed daily qual. All data in spec. Hotspot test good. System OK to use. From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-22 09:04:06: Starting ASML DEMO Message-ID: <19339693.43.1345651447240.JavaMail.coral@shine> From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-22 15:02:37: Edge sensor problem Message-ID: <30742200.56.1345672957543.JavaMail.coral@shine> The wafer edge sensor, used for pre-alignment is not working correctly. FSE needs to troubleshoot and repair. From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-22 15:02:37: Edge sensor problem Message-ID: <13419636.57.1345673005872.JavaMail.coral@shine> ASML Shutdown From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-22 15:03:57: ASML Demo WH Cal prob Message-ID: <3402194.58.1345673038030.JavaMail.coral@shine> The wafer edge sensor, used for pre-alignment is not working correctly. FSE needs to troubleshoot and repair. From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-22 15:03:57: ASML Demo WH Cal prob Message-ID: <23876757.67.1345681030437.JavaMail.coral@shine> Did WH cal and Quals in spec. Ok to use From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-24 10:50:30: ASML Released Reservations 11:30-14:00 Message-ID: <20927550.134.1345830630181.JavaMail.coral@shine> From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-28 12:34:26: ASML Released Reservations 13:00-14:00 Message-ID: <3348148.45.1346182466763.JavaMail.coral@shine> From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-29 12:37:23: ASML Released Reservations 13:00-14:00 Message-ID: <26507707.82.1346269043778.JavaMail.coral@shine> From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-06-26 18:19:22: Up Message-ID: <7820874.93.1346334889290.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-06-29 17:04:41: Update 6/29 Message-ID: <20435742.94.1346334903369.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-07-07 11:11:33: system up for frontside Message-ID: <14050887.95.1346334912396.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-07-17 16:43:25: Update 7/17 Message-ID: <14914928.96.1346334949544.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-07-30 09:12:56: HotSpot Found, Cleaned E chuck and tested, Ok to use Message-ID: <11329303.97.1346334955582.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-03 08:56:37: HotSpot Found, Cleaned E chuck and tested, Ok to use Message-ID: <9105957.98.1346334960600.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-08 09:53:37: Hotspot 8/8 Message-ID: <31748850.99.1346334966628.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-10 09:30:03: Hotspots Found for the las 4 days Message-ID: <20751351.100.1346334971655.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-17 08:28:57: Found A Hotspot , CleANED E chuck,, tested Ok to use. Message-ID: <6279832.101.1346334994754.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-17 11:39:12: ASML Released Reservations 12:00-14:00 Message-ID: <25562784.102.1346335000762.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-19 14:03:53: status 8/19 Message-ID: <27352834.103.1346335005789.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-20 15:52:26: Still Down 8/20/2012 Message-ID: <615188.104.1346335019867.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-21 14:20:29: System Up 8/21 Message-ID: <11935889.105.1346335024885.JavaMail.coral@shine> To Archive From eldwin at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-30 22:39:26: wafer stuck in stepper Message-ID: <21464649.143.1346391567202.JavaMail.coral@shine> system error occurred and aborted processing. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-08-30 22:39:26: wafer stuck in stepper Message-ID: <22855989.5.1346428770227.JavaMail.coral@shine> Recovered stranded wafers from tool. Errored for robot failure to pick up wafer from input cassette. Visual inspection OK. Wafer does not float on granite. From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-31 11:22:41: ASMl Released Reservations 11:30-14:00 Message-ID: <22572759.15.1346437362052.JavaMail.coral@shine> From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-05 12:48:39: ASML Released Reservations 13:00-14:00 Message-ID: <14860469.41.1346874520026.JavaMail.coral@shine> From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-11 15:13:25: ASML PM Day 1 Completed Message-ID: <19124291.84.1347401606032.JavaMail.coral@shine> Okay to use From kavehm at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-09-11 15:48:17: level sensor Message-ID: <8190915.88.1347403697592.JavaMail.coral@shine> level sensor failed on startup. asml has been notified and will be here tomorrow morning. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-09-11 15:48:17: level sensor Message-ID: <2503855.125.1347492995859.JavaMail.coral@shine> The purge/extraction hood dropped off of its mounts. ASML F/S adjusted shimms for critical gaps and re-installed the purge hood. All necessary metrology testing and calibrations performed. New system reference state defined. Daily testing OK.The purge hood installation is still being monitored closely by ASML field service. If the tool errors or aborts for any reason, do not attemp to recover your wafers or do any initializing. Leave the system as is and shut it down in Coral. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-12 16:37:07: Update- Please Read 9/12 Message-ID: <21165495.126.1347493027866.JavaMail.coral@shine> The purge/extraction hood dropped off of its mounts. ASML F/S adjusted shimms for critical gaps and re-installed the purge hood. All necessary metrology testing and calibrations performed. New system reference state defined. Daily testing OK.The purge hood installation is still being monitored closely by ASML field service. If the tool errors or aborts for any reason, do not attemp to recover your wafers or do any initializing. Leave the system as is and shut it down in Coral. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-07-07 11:14:16: 3Dalign off from last calibration Message-ID: <3163817.132.1347546630797.JavaMail.coral@shine> From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-05-03 16:02:39: No thick resist processing Message-ID: <9997414.133.1347546866880.JavaMail.coral@shine> The purge/extraction hood dropped off of its mounts. ASML F/S adjusted shimms for critical gaps and re-installed the purge hood. All necessary metrology testing and calibrations performed. New system reference state defined. Daily testing OK.The purge hood installation is still being monitored closely by ASML field service. If the tool errors or aborts for any reason, do not attemp to recover your wafers or do any initializing. Leave the system as is and shut it down in Coral. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-09-13 15:34:49: Please Read 9/13 Message-ID: <17316302.154.1347575690558.JavaMail.coral@shine> There is a wafer loading repeatability problem that needs to be diagnosed and repaired by ASML. DO NOT EXPOSE ANY ZERO LAYERS OR USE 3D ALIGNMENT UNTIL ASML RESOLVES THE ISSUES. ASML F/S will be back in tommorow morning to work on the problem. From wslee at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-09-13 16:15:36: software frozen Message-ID: <456800.156.1347578136704.JavaMail.coral@shine> I was modifying my job file and deleted some instances in the image distribution section. The hourglass appeared and stays on the screen. I cannot exit out of the screen. From zguo at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-09-14 00:14:54: software frozen, can not start process Message-ID: <1231483.164.1347606895111.JavaMail.coral@shine> As described by wslee, the software is frozen, so could not use the machine. From zguo at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-09-14 00:39:35: Shut down Message-ID: <14186289.165.1347608376178.JavaMail.coral@shine> Since the software is frozen and no one can use it, to avoid other users come by mistake, here I shut down the machine. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-09-14 15:31:05: No Thick Resist or 3D Align 9/14 Message-ID: <2146459.21.1347661866182.JavaMail.coral@shine> Do not expose thick resist (3.0 microns and above) until further notice. The purge/extraction hood was removed from the system again. There is some unusual problem with the hood that we do not understand yet, that is causing contamination and damage to the optical surfaces on the wafer table and fiducial plates. To avoid any further damage, it was decided to remove the purge hood. The system is released for frontside align only, including zero layer. The system is not available for thick resist processing and 3D align. The 3D alignment system will be calibrated next Tuesday( 9/18) From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-09-14 00:39:35: Shut down Message-ID: <4171898.22.1347661935204.JavaMail.coral@shine> System software reset From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-09-14 00:14:54: software frozen, can not start process Message-ID: <3327004.23.1347661951212.JavaMail.coral@shine> system software reset From vilanova at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-19 09:33:40: Hotspot Message-ID: <17780035.34.1348072421971.JavaMail.coral@shine> Found A Big Hotspot On the Bottom Right hand Side of wafer, Cleaned E chuck , Exposed wafer, All Operations Ok , Ready to use. please make sure the back of your wafers are clean. From vilanova at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-20 09:15:07: Hotspot..!! Message-ID: <667752.78.1348157707839.JavaMail.coral@shine> Found A Hotspot On the Bottom Right hand Side of wafer, (Same Place as Yesterday) Cleaned E chuck , Exposed wafer, All Operations Ok , Ready to use. please make sure the back of your wafers are clean. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-21 12:44:06: 3D align up 9/21 Message-ID: <25544364.19.1348256647244.JavaMail.coral@shine> 3D align calibration completed by ASML. System is up for frontside and backside alignments. From vilanova at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-24 09:29:47: Message-ID: <9831273.16.1348504187745.JavaMail.coral@shine> Found A couple of hotspots next to the wafer flat, Cleaned E chuck , Exposed wafer, All Operations Ok , Ready to use. please make sure the back of your wafers are clean. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-25 09:42:40: Hotspot 9/25 Message-ID: <20886204.8.1348591361526.JavaMail.coral@shine> Hotspot on left side of wafer. Cleaned with tooling. Retest OK. From mnakamura at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-28 11:59:46: release ASML Message-ID: <3379514.97.1348858786950.JavaMail.coral@shine> release ASML from 12:00 to 14:00 today (09/28/12) From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-02 12:37:09: ASML Released Reservations 12:30-14:00 Message-ID: <14126264.9.1349206629950.JavaMail.coral@shine> From eperalta at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-10-04 04:33:54: software frozen Message-ID: <24715393.26.1349350435001.JavaMail.coral@shine> the software froze (mouse pointer shown as clock) during a job definition modification. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-10-04 04:33:54: software frozen Message-ID: <30336187.32.1349365480594.JavaMail.coral@shine> Rebooted aoolications software. Daily quals OK. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-14 15:29:54: ASML QPM Day 1 completed Message-ID: <14800345.50.1349446532442.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-15 16:01:40: ASML QPM Day 2 completed Message-ID: <19707982.51.1349446538491.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-22 09:04:06: Starting ASML DEMO Message-ID: <997747.52.1349446543549.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-24 10:50:30: ASML Released Reservations 11:30-14:00 Message-ID: <13404170.53.1349446549617.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-28 12:34:26: ASML Released Reservations 13:00-14:00 Message-ID: <5223193.54.1349446553664.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-29 12:37:23: ASML Released Reservations 13:00-14:00 Message-ID: <12265219.55.1349446558713.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-08-31 11:22:41: ASMl Released Reservations 11:30-14:00 Message-ID: <26955380.56.1349446563761.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-05 12:48:39: ASML Released Reservations 13:00-14:00 Message-ID: <23344688.57.1349446568808.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-11 15:13:25: ASML PM Day 1 Completed Message-ID: <23125466.58.1349446574877.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-12 16:37:07: Update- Please Read 9/12 Message-ID: <24211965.59.1349446622325.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-28 11:59:46: release ASML Message-ID: <33001541.60.1349446647584.JavaMail.coral@shine> To Archives From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-02 12:37:09: ASML Released Reservations 12:30-14:00 Message-ID: <780194.61.1349446653651.JavaMail.coral@shine> To Archives From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-10 13:33:04: ASML Released Reservations 14:00-16:00 Message-ID: <13296997.59.1349901184862.JavaMail.coral@shine> ASML MPM Day 2 completed From mahnaz at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-10-12 15:39:47: 3D is Not qualified Message-ID: <5047568.125.1350081587671.JavaMail.coral@shine> We will run quals next week, please do not run the 3D. From vilanova at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-15 09:28:30: Hotspot....!! Message-ID: <6275088.11.1350318511665.JavaMail.coral@shine> Found A Hotspot Located at 3 Oclock Right Hand side of wafer, Cleaned E chuck With Tooling, tested , Ready to use. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-16 12:47:59: Reservations Released 10/16 Message-ID: <15976379.46.1350416879677.JavaMail.coral@shine> ASML Applications group reservation released for the remainder of the day. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-10-12 15:39:47: 3D is Not qualified Message-ID: <14462994.32.1350593613484.JavaMail.coral@shine> 3D alignment system calibrated by ASML. System OK to use for backside alignment. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-18 13:54:05: 3D align up 10/18 Message-ID: <27575232.33.1350593646493.JavaMail.coral@shine> 3D alignment system calibrated by ASML. System OK to use for backside alignment. From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-18 14:37:07: ASML Released Reservations 14:30-16:00 Message-ID: <14530601.34.1350596227534.JavaMail.coral@shine> From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-10-18 15:35:19: No Glass or Quartz Wafers Message-ID: <2280049.35.1350599719770.JavaMail.coral@shine> The edge sensor is having a problem detecting glass or quartz wafers. Please do not process glass or quartz wafers throught the stepper until ASML field service can check and adjust the edge sensor. From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-10-18 15:35:19: No Glass or Quartz Wafers Message-ID: <16487038.65.1350673994462.JavaMail.coral@shine> ASML adjusted Edge Sensor and it's up for Glass & Quartz. From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-23 15:08:47: ASML Released Reservations until 16:00 Message-ID: <12640099.50.1351030128820.JavaMail.coral@shine> From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-23 15:10:07: Hotspot CK Message-ID: <33362581.51.1351030207839.JavaMail.coral@shine> Found hotspot lower left of wafer. ASML/SNF cleaned E-Chuck. Hotspot ck ok From vilanova at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-24 08:56:54: Hotspot...! Message-ID: <13104734.70.1351094215025.JavaMail.coral@shine> Found a Big Hotspot On The Bottom Left hand side of wafer, Cleaned E chuck With Tooling and tested , Ready to use. From vilanova at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-26 09:07:32: 2 Hotspots Found During QUals Routine Message-ID: <8331019.113.1351267653624.JavaMail.coral@shine> Found 2 large Hotspots During My Daily Quals Routine , Cleaned E Chuck With Tooling Ok to use . From vilanova at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-05 09:27:24: Found a hotspot During Daily Quals Message-ID: <14495535.17.1352136444428.JavaMail.coral@shine> Found a hotspot During Daily Quals , Cleaned E chuck with tooling, All operations Ok, Ready to use. From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-06 09:41:30: ASML Starting Purge Hood Work Message-ID: <2797256.10.1352223690700.JavaMail.coral@shine> From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-06 15:25:05: ASML Focus of out Spec Message-ID: <31958702.33.1352244306289.JavaMail.coral@shine> ASML will be stabilizing overnight. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-07 15:58:30: Room Temp problem 11/7 Message-ID: <5238287.8.1352332711113.JavaMail.coral@shine> Temperature in L-106 near the stepper is currently 24.1 degrees C... The stepper is reporting an incoming air temperaure error because of this. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-06 15:25:05: ASML Focus of out Spec Message-ID: <15531576.9.1352332773312.JavaMail.coral@shine> System is stabilized and focus is near zero. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-09-13 16:15:36: software frozen Message-ID: <2933460.10.1352332787381.JavaMail.coral@shine> From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-09-13 15:34:49: Please Read 9/13 Message-ID: <3779138.11.1352332858550.JavaMail.coral@shine> Purge hood re-installed and testing/setup completed. OK to process with thick resist. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-09-14 15:31:05: No Thick Resist or 3D Align 9/14 Message-ID: <678620.12.1352332865567.JavaMail.coral@shine> Purge hood re-installed and testing/setup completed. OK to process with thick resist. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-07 17:30:38: Status 11/7 Message-ID: <7003951.16.1352338239752.JavaMail.coral@shine> Temperature at ASML Stepper is currently 24.8 degrees. Stepper generating an error for incoming air temperature too high. Shutdown the systems C&T unit to protect if from working too hard to control temperature. Facilities group have been notified of the temperature problem. From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-08 15:52:25: ASML is Stabilizing Overnight Message-ID: <12545448.52.1352418746042.JavaMail.coral@shine> From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-09 12:47:54: Badger Install 11/9 Message-ID: <12488210.16.1352494074569.JavaMail.coral@shine> Installed and activated badger interlock box in place of Coral box. Interlock tested OK. The "ON" display was replaced with a 2 color LED. When the red light is on, the tool is disabled. When the green light is on, the tool is enabled. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-07 15:58:30: Room Temp problem 11/7 Message-ID: <8150663.34.1352511280557.JavaMail.coral@shine> Room temperature problem corrected by facilities group on 11/8. Allowed system to stabilize. Focus checked and adjusted. New reference state defined. IQC and hotspot performed-All OK From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-07 17:30:38: Status 11/7 Message-ID: <19118327.35.1352511292576.JavaMail.coral@shine> Room temperature problem corrected by facilities group on 11/8. Allowed system to stabilize. Focus checked and adjusted. New reference state defined. IQC and hotspot performed-All OK From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-08 15:52:25: ASML is Stabilizing Overnight Message-ID: <2711508.36.1352511301635.JavaMail.coral@shine> Room temperature problem corrected by facilities group on 11/8. Allowed system to stabilize. Focus checked and adjusted. New reference state defined. IQC and hotspot performed-All OK From xzhuan1 at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-13 19:01:06: reticle found outside carrier Message-ID: <18434169.37.1352862067348.JavaMail.coral@shine> error message says reticle found outside carrier. Unable to unload reticle so it's still inside the stepper. Ben Chui helped me to do fast start and full start but still same problem. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-13 19:01:06: reticle found outside carrier Message-ID: <26846494.42.1352912054786.JavaMail.coral@shine> There was a timeout in a reticle handling function that caused the eoor. Re-initialized R/H and removed reticle. Performed reticle loads/unloads- OK. Performed daily qual- All OK From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-14 08:55:02: Hotspot 11/14 Message-ID: <24526347.43.1352912102954.JavaMail.coral@shine> Small hotspot at 5:00. Cleaned e-chuck and retested. retest OK From mnakamura at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-14 12:25:31: asml released 12:00 to 14:00 Message-ID: <6280422.57.1352924732577.JavaMail.coral@shine> asml released 12:00 to 14:00 today. From xzhuan1 at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-14 15:18:54: reticle handling error Message-ID: <9763851.66.1352935134744.JavaMail.coral@shine> cannot unload reticle. both Gary and Mario have left for the day so I called up ASML and was adviced by Carlos to shut down the machine and leave the reticle in the stepper. He'll be here to resolve the situation tomorrow morning. From vilanova at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-14 15:18:54: reticle handling error Message-ID: <16208639.74.1352993008658.JavaMail.coral@shine> There was a timeout in a reticle handling function that caused the error. Re-initialized R/H and removed reticle. Performed reticle loads/unloads- OK. Performed daily qual- All OK From mnakamura at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-15 14:46:06: 15~16 ASML released today Message-ID: <15467598.84.1353019566509.JavaMail.coral@shine> ASML released - 15:00-16:00 today From eperalta at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-11-16 01:07:35: Wafers stuck in tool Message-ID: <23527528.103.1353056855408.JavaMail.coral@shine> Got message "error during recovery of wafer" during batch execution. Was given option to abort batch and clear stepper... said ok but it could not clear the stepper and it suggested I do a "Fast start up"...said ok to this but got error message "Wafer handing initialisation halted" and warned me about Dipod and e-pins being in unsave situation and that damage to wafer is possible. Not shutting down in case an advanced user needs the tool and knows how to fix this issue before asml looks at it, otherwise treat this problem as a shutdown. Wafer holders where my wafers can be stored once removed were left by the tool From eperalta at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-16 01:40:33: see previous message Message-ID: <14536956.104.1353058833507.JavaMail.coral@shine> wafers stuck inside From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-16 01:40:33: see previous message Message-ID: <24279765.113.1353086003478.JavaMail.coral@shine> Recovered users stranded wafer from Echuck. Wafer failed for vacuum at e-chuck. Of the 3 wafer lot, this wafer did not float on the granite table. Wafers 1 and 3 did float very well on the granite. Cleaned the E-chuck and performed the daily qual. All OK , tool function OK. USERS: Please observe and follow the tool protocals for checking wafers prior to running them on the stepper. If there is a potential issue with your wafers, you can make arrangements with staff to do processing during the day, when staff is here to assist. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-11-16 01:07:35: Wafers stuck in tool Message-ID: <12105011.114.1353086010496.JavaMail.coral@shine> Recovered users stranded wafer from Echuck. Wafer failed for vacuum at e-chuck. Of the 3 wafer lot, this wafer did not float on the granite table. Wafers 1 and 3 did float very well on the granite. Cleaned the E-chuck and performed the daily qual. All OK , tool function OK. USERS: Please observe and follow the tool protocals for checking wafers prior to running them on the stepper. If there is a potential issue with your wafers, you can make arrangements with staff to do processing during the day, when staff is here to assist. From paulyoon at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: paulyoon at snf.stanford.edu (paulyoon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-17 13:29:16: A wafer is staying on E-Chuck Message-ID: <16262359.138.1353187757170.JavaMail.coral@shine> A wafer is staying on E-chuck. There was "Clear stepper" option, I tryied it. But it doesn't work. From eperalta at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-17 16:55:24: It appears the tool is sad... Message-ID: <27284603.141.1353200125048.JavaMail.coral@shine> ... because nobody will come play with it this weekend From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-17 13:29:16: A wafer is staying on E-Chuck Message-ID: <303229.143.1353214261289.JavaMail.coral@shine> OK .. This is about the same entry I wrote from a few days ago regarding another stuck wafer situation..Recovered users stranded wafer from Echuck. Wafer failed for vacuum at e-chuck. Of the 2 wafer lot, this wafer did not float on the granite table. Cleaned the E-chuck and tested system operation. Tool function OK. USERS: Please observe and follow the tool protocals for checking wafers prior to running them on the stepper. If there is a potential issue with your wafers, you can make arrangements with staff to do processing during the day, when staff is here to assist. I stress to you!!!!Please know and understand the condition of your wafers prior to processing them on the stepper. Check them on the granite surface and use the Tencor stressguage to measure the Bow/Warpage of your wafers. If you suspect your wafers are "high risk" and may get stuck in the stepper, make arrangements with staff to test or process them during staff hours. This information is covered in the ASML training and should not be new to you. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-17 16:55:24: It appears the tool is sad... Message-ID: <3734540.144.1353214310461.JavaMail.coral@shine> OK .. This is about the same entry I wrote from a few days ago regarding another stuck wafer situation..Recovered users stranded wafer from Echuck. Wafer failed for vacuum at e-chuck. Of the 2 wafer lot, this wafer did not float on the granite table. Cleaned the E-chuck and tested system operation. Tool function OK. USERS: Please observe and follow the tool protocals for checking wafers prior to running them on the stepper. If there is a potential issue with your wafers, you can make arrangements with staff to do processing during the day, when staff is here to assist. I stress to you!!!!Please know and understand the condition of your wafers prior to processing them on the stepper. Check them on the granite surface and use the Tencor stressguage to measure the Bow/Warpage of your wafers. If you suspect your wafers are "high risk" and may get stuck in the stepper, make arrangements with staff to test or process them during staff hours. This information is covered in the ASML training and should not be new to you. From mnakamura at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-20 14:58:23: Released ASML - 15:00-16:00 Today (11/20) Message-ID: <1710895.2.1353452304152.JavaMail.coral@shine> Released ASML - 15:00-16:00 Today (11/20) From vilanova at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-21 09:10:19: Hotspot Found at top left hand side of wafer. Message-ID: <33173632.13.1353517820841.JavaMail.coral@shine> Hotspot Found at top left hand side of wafer. Cleaned With Tooling, tested , Ok to use. From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-21 12:11:49: ASML Released Reservations 12:30-14:00 Message-ID: <13858055.21.1353528710279.JavaMail.coral@shine> From hongyuc at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: hongyuc at snf.stanford.edu (hongyuc at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-27 17:00:31: 2 wafers stuck inside Message-ID: <22293510.15.1354064432764.JavaMail.coral@shine> I tried fast start-up and full start-up to remove the wafers. but both didn't work. There are two wafers inside though one of them is missing on the screen. sorry for the inconvenience. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-11-27 17:00:31: 2 wafers stuck inside Message-ID: <30287876.39.1354122592234.JavaMail.coral@shine> Removed users stranded wafers. Wafer 1 failed at E-chuck because of a vacuum error. Visual inspection of the back of the wafer showed a smal black artifact that has some height above the wafer surface. The wafer also did not float on the granite. Once again::: USERS- You are responsible for inspecting the backs of your wafers prior to processing them through the stepper. Especially small lots. This was a 2 wafer lot. It would not have taken that much time to inspect and test the wafers. Because of this, the tool was down for 16 hours and many users inconvenienced. PLEASE INSPECT YOUR WAFERS From mnakamura at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-30 13:31:26: Message-ID: <12706060.7.1354311086617.JavaMail.coral@shine> From mnakamura at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-30 13:34:56: ASML ready to use Message-ID: <15997082.8.1354311296682.JavaMail.coral@shine> Now the system is stable after the steam is back. From ntayebi at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-12-01 10:16:41: wafer lost inside Message-ID: <20137786.28.1354385801993.JavaMail.coral@shine> I got a temperature error with it being below 21 C and my wafer got lost inside. Very important wafer to retrieve From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Shutdown asml SNF 2012-12-01 10:16:41: wafer lost inside Message-ID: <30965162.31.1354397057315.JavaMail.coral@shine> Lab temperature was at 15 dec.C. C&T warning wa for incoming air temperature too cold. Retreived stranded wafer from the system. Re-inititailized all hardware and tested operation. As I type this message the fab temperature and humidity appears to be restabilizing at normal setpoints. From karthikv at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-12-01 14:16:45: Wafer handler Message-ID: <2700292.33.1354400206412.JavaMail.coral@shine> System is not couting number of wafer in input carrier correctly. Lost a wafer due to this, but Gary helped retrieve it. From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-12-04 12:42:17: ASML Released Reservations until 14:00 Message-ID: <21089537.11.1354653737347.JavaMail.coral@shine> From xuanwu at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-12-04 23:00:13: sender problem Message-ID: <5015972.40.1354690813761.JavaMail.coral@shine> Ran into a problem where the tool had a problem reading the sender cassette and asked to do fast startup. So I did a fast startup and it worked. From vilanova at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Problem asml SNF 2012-12-04 23:00:13: sender problem Message-ID: <9732201.0.1354724132594.JavaMail.coral@shine> Sender Cassette Indexer Working FIne, Ran Cuals, All Operations are good No Hotspots, Ok to use. From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-19 09:33:40: Hotspot Message-ID: <1791474.5.1354811268948.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-20 09:15:07: Hotspot..!! Message-ID: <24814939.6.1354811274006.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-21 12:44:06: 3D align up 9/21 Message-ID: <21771566.7.1354811281074.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-24 09:29:47: Message-ID: <20716393.8.1354811287141.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-09-25 09:42:40: Hotspot 9/25 Message-ID: <31880254.9.1354811291188.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-10 13:33:04: ASML Released Reservations 14:00-16:00 Message-ID: <8011894.10.1354811298266.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-15 09:28:30: Hotspot....!! Message-ID: <22176987.11.1354811303323.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-16 12:47:59: Reservations Released 10/16 Message-ID: <1332610.12.1354811308371.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-18 13:54:05: 3D align up 10/18 Message-ID: <28597724.13.1354811313428.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-18 14:37:07: ASML Released Reservations 14:30-16:00 Message-ID: <32142906.14.1354811318486.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-23 15:08:47: ASML Released Reservations until 16:00 Message-ID: <6581243.15.1354811323544.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-23 15:10:07: Hotspot CK Message-ID: <22690450.16.1354811329611.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-24 08:56:54: Hotspot...! Message-ID: <14227847.17.1354811333661.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-10-26 09:07:32: 2 Hotspots Found During QUals Routine Message-ID: <14610109.18.1354811339729.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-05 09:27:24: Found a hotspot During Daily Quals Message-ID: <31166350.19.1354811345796.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-06 09:41:30: ASML Starting Purge Hood Work Message-ID: <25671167.20.1354811352874.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-14 12:25:31: asml released 12:00 to 14:00 Message-ID: <24230975.21.1354811370022.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-15 14:46:06: 15~16 ASML released today Message-ID: <25212153.22.1354811377101.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-20 14:58:23: Released ASML - 15:00-16:00 Today (11/20) Message-ID: <32380789.23.1354811382159.JavaMail.coral@shine> To Archive From gsosa at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-11-21 12:11:49: ASML Released Reservations 12:30-14:00 Message-ID: <2849753.24.1354811388226.JavaMail.coral@shine> To Archive From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-12-06 11:58:54: ASML Released Reservations 12:00-14:00 Message-ID: <18129670.1.1354823935024.JavaMail.coral@shine> From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-12-07 08:19:56: SNF Reticle SMIF Pod Open Message-ID: <21797986.19.1354897197470.JavaMail.coral@shine> Found the SNF Reticle SMIF Pod Open. Pls close SMIF Pod after taking out your reticle. We try to reduce the particles in the SMIF Pod. Thank you, ASML From vilanova at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-12-12 08:36:59: No Hotspots During Quals Message-ID: <30725267.0.1355330220379.JavaMail.coral@shine> There were no hotspots during the daily Quals Today, ALSO I REMOVED LINDA'S RESERVATIONS SO PEOPLE CAN COME IN AND USE THE SYSTEM EARLIER. From lindaohara at snf.stanford.edu Sun Dec 23 08:43:48 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:43:48 -0000 Subject: Comment asml SNF 2012-12-13 11:08:01: ASML Released Reservations 11:30-14:00 Message-ID: <11750355.26.1355425682534.JavaMail.coral@shine>