From gsosa at snf.stanford.edu  Wed Feb 22 13:00:03 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 22 Feb 2012 13:00:03 -0800
Subject: Shutdown asml SNF 2011-12-13 16:07:44: Shutdown for Renovation
Message-ID: <mailman.2264.1356281046.3396.asml-pcs@snf.stanford.edu>

Stepper conversion back to 4" wafer size is completed. All critical setup for wafer handling and positioning checked and updated, if needed. Performed daily tests and verified good results. STEPPER IS UP FOR FRONT-SIDE ALIGN ONLY. 3-D ALIGN WILL BE AVAILABLE AT A LATER DATE, STILL TO BE DETERMINED. Please check back in Coral for the latest tool updates. 



From gsosa at snf.stanford.edu  Wed Feb 22 13:00:31 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 22 Feb 2012 13:00:31 -0800
Subject: Comment asml SNF 2012-02-22 13:00:30: Update 2/22/12
Message-ID: <mailman.2265.1356281046.3396.asml-pcs@snf.stanford.edu>

Stepper conversion back to 4" wafer size is completed. All critical setup for wafer handling and positioning checked and updated, if needed. Performed daily tests and verified good results. STEPPER IS UP FOR FRONT-SIDE ALIGN ONLY. 3-D ALIGN WILL BE AVAILABLE AT A LATER DATE, STILL TO BE DETERMINED.



From gsosa at snf.stanford.edu  Thu Feb 23 09:57:09 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 23 Feb 2012 09:57:09 -0800
Subject: Comment asml SNF 2012-02-23 09:57:08: Reservations released 2/23
Message-ID: <mailman.2266.1356281046.3396.asml-pcs@snf.stanford.edu>

ASML special apps reservations released for today. Tool is available for use.



From lindaohara at snf.stanford.edu  Wed Feb 29 08:45:00 2012
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Wed, 29 Feb 2012 08:45:00 -0800
Subject: Shutdown asml SNF 2012-02-29 08:44:59: C&T Terminated
Message-ID: <mailman.2267.1356281046.3396.asml-pcs@snf.stanford.edu>

Safety light on



From gsosa at snf.stanford.edu  Wed Feb 29 09:28:09 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 29 Feb 2012 09:28:09 -0800
Subject: Shutdown asml SNF 2012-02-29 08:44:59: C&T Terminated
Message-ID: <mailman.2268.1356281046.3396.asml-pcs@snf.stanford.edu>

Reset the TCU controller. Did full start-up to initialize hardware. Full start-up OK. System running normally.



From lindaohara at snf.stanford.edu  Wed Feb 29 12:03:58 2012
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Wed, 29 Feb 2012 12:03:58 -0800
Subject: Shutdown asml SNF 2012-02-29 12:03:58: No vacuum
Message-ID: <mailman.2269.1356281046.3396.asml-pcs@snf.stanford.edu>




From lindaohara at snf.stanford.edu  Wed Feb 29 14:12:15 2012
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Wed, 29 Feb 2012 14:12:15 -0800
Subject: Shutdown asml SNF 2012-02-29 12:03:58: No vacuum
Message-ID: <mailman.2270.1356281046.3396.asml-pcs@snf.stanford.edu>

vacuum okay now. okay to use