From gsosa at snf.stanford.edu Mon Jul 2 15:42:36 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 2 Jul 2012 15:42:36 -0700 Subject: Shutdown asml SNF 2012-07-02 15:42:35: Scheduled Shutdown 7/2 Message-ID: ASML stepper is set up for 6" to do critical calibrations. Stepper will be down overnight. From pding at snf.stanford.edu Thu Jul 5 19:57:38 2012 From: pding at snf.stanford.edu (pding at snf.stanford.edu) Date: Thu, 5 Jul 2012 19:57:38 -0700 Subject: Comment asml SNF 2012-07-05 19:57:38: System not accessible to users on Thu and Fri night Message-ID: Due to the nature of the ASML project, the system needs to be kept in a special configuration and continue running. The system will not be available to users on the night of 7/5 and 7/6. Target time for system to be up is 10pm of Saturday, 7/7. Thank you. Ping Ding ASML Apps Engineer From pding at snf.stanford.edu Sat Jul 7 11:09:21 2012 From: pding at snf.stanford.edu (pding at snf.stanford.edu) Date: Sat, 7 Jul 2012 11:09:21 -0700 Subject: Shutdown asml SNF 2012-07-02 15:42:35: Scheduled Shutdown 7/2 Message-ID: From pding at snf.stanford.edu Sat Jul 7 11:09:31 2012 From: pding at snf.stanford.edu (pding at snf.stanford.edu) Date: Sat, 7 Jul 2012 11:09:31 -0700 Subject: Comment asml SNF 2012-07-05 19:57:38: System not accessible to users on Thu and Fri night Message-ID: From pding at snf.stanford.edu Sat Jul 7 11:11:33 2012 From: pding at snf.stanford.edu (pding at snf.stanford.edu) Date: Sat, 7 Jul 2012 11:11:33 -0700 Subject: Comment asml SNF 2012-07-07 11:11:33: system up for frontside Message-ID: system up for frontside. Backside off from last calibration. From pding at snf.stanford.edu Sat Jul 7 11:14:17 2012 From: pding at snf.stanford.edu (pding at snf.stanford.edu) Date: Sat, 7 Jul 2012 11:14:17 -0700 Subject: Problem asml SNF 2012-07-07 11:14:16: 3Dalign off from last calibration Message-ID: 3Dalign off from last calibration. DO not use for critical work. From gsosa at snf.stanford.edu Tue Jul 10 07:06:56 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:06:56 -0700 Subject: Comment asml SNF 2012-04-24 17:43:45: When will BSA be up? Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:07:01 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:07:01 -0700 Subject: Comment asml SNF 2012-04-26 15:55:45: Hotspots 4/26 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:07:06 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:07:06 -0700 Subject: Comment asml SNF 2012-04-27 09:59:12: Hotspot CK Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:07:13 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:07:13 -0700 Subject: Comment asml SNF 2012-04-30 17:06:05: Update 4/30 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:07:21 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:07:21 -0700 Subject: Comment asml SNF 2012-05-01 18:35:48: Up for frontside align Only 5/1 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:07:30 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:07:30 -0700 Subject: Comment asml SNF 2012-05-03 15:59:41: Front and backside align OK 5/3 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:07:36 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:07:36 -0700 Subject: Comment asml SNF 2012-05-11 09:34:56: ASML Released Reservatins 10:00-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:07:47 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:07:47 -0700 Subject: Comment asml SNF 2012-05-25 12:46:33: 3DAlign is up Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:07:54 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:07:54 -0700 Subject: Comment asml SNF 2012-05-29 09:50:51: Hotspot Found On Lower right hand corner Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:07:59 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:07:59 -0700 Subject: Comment asml SNF 2012-05-30 09:58:46: ASML Released Reservations 11:00-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:08:04 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:08:04 -0700 Subject: Comment asml SNF 2012-05-31 11:36:49: ASML Released Reservations 12:00-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:08:31 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:08:31 -0700 Subject: Comment asml SNF 2012-05-03 17:36:19: Tried BSA -- largely fine, minor hiccups Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:08:36 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:08:36 -0700 Subject: Comment asml SNF 2012-06-04 09:26:08: HotSpot Found On Top Right Hand Side. Cleaned E chuck , Tested All Ok, Ready to use Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:08:42 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:08:42 -0700 Subject: Comment asml SNF 2012-06-06 10:31:21: ASML Released Reservations 11:00-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:08:46 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:08:46 -0700 Subject: Comment asml SNF 2012-06-07 11:21:51: ASML Released Reservations 12:00-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Jul 10 07:09:23 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:09:23 -0700 Subject: Comment asml SNF 2012-06-07 15:53:07: Hotspot 6/7 Message-ID: To Archives From vilanova at snf.stanford.edu Tue Jul 10 09:30:22 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 10 Jul 2012 09:30:22 -0700 Subject: Comment asml SNF 2012-07-10 09:30:21: Hotspot Message-ID: Found A Hotspot , CleANED E chuck,, tested Ok to use. From lindaohara at snf.stanford.edu Fri Jul 13 12:13:38 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 13 Jul 2012 12:13:38 -0700 Subject: Comment asml SNF 2012-07-13 12:13:37: ASML Released Reservations 12:30-14:00 Message-ID: From vilanova at snf.stanford.edu Mon Jul 16 10:20:07 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 16 Jul 2012 10:20:07 -0700 Subject: Comment asml SNF 2012-07-16 10:20:07: HotSpot Found, Cleaned E chuck and tested, Ok to use Message-ID: HotSpot Found, Cleaned E chuck and tested, Ok to use From gsosa at snf.stanford.edu Tue Jul 17 16:43:25 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 17 Jul 2012 16:43:25 -0700 Subject: Comment asml SNF 2012-07-17 16:43:25: Update 7/17 Message-ID: Day 1 of monthly PM completed. RIS plate replaced. Red/Blue checked and new reference state defined. From lindaohara at snf.stanford.edu Thu Jul 19 14:06:04 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 19 Jul 2012 14:06:04 -0700 Subject: Comment asml SNF 2012-07-19 14:06:03: ASML Released Reservations 14:30-16:00 Message-ID: From leixin at snf.stanford.edu Sat Jul 21 10:41:29 2012 From: leixin at snf.stanford.edu (leixin at snf.stanford.edu) Date: Sat, 21 Jul 2012 10:41:29 -0700 Subject: Shutdown asml SNF 2012-07-21 10:41:28: Wafer rejected and trapped in the machine Message-ID: From gsosa at snf.stanford.edu Sat Jul 21 19:54:08 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 21 Jul 2012 19:54:08 -0700 Subject: Shutdown asml SNF 2012-07-21 10:41:28: Wafer rejected and trapped in the machine Message-ID: Removed stranded wafers from the system. Re-initialized all hardware. Ran many wafers through the system. All OK. From lindaohara at snf.stanford.edu Tue Jul 24 11:10:18 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 24 Jul 2012 11:10:18 -0700 Subject: Comment asml SNF 2012-07-24 11:10:17: ASML Released Reservatins 11:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Jul 26 10:32:10 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 26 Jul 2012 10:32:10 -0700 Subject: Comment asml SNF 2012-07-26 10:32:09: ASML Released Reservations 11:00-14:00 Message-ID: From vilanova at snf.stanford.edu Mon Jul 30 09:12:57 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 30 Jul 2012 09:12:57 -0700 Subject: Comment asml SNF 2012-07-30 09:12:56: HotSpot Found, Cleaned E chuck and tested, Ok to use Message-ID: HotSpot Found, Cleaned E chuck and tested, Ok to use From lindaohara at snf.stanford.edu Tue Jul 31 15:01:47 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 31 Jul 2012 15:01:47 -0700 Subject: Comment asml SNF 2012-07-31 15:01:47: ASMl Released Reservations 15:00-16:00 Message-ID: