Shutdown asml SNF 2012-07-21 10:41:28: Wafer rejected and trapped in the machine

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sat Jul 21 19:54:08 PDT 2012


Removed stranded wafers from the system. Re-initialized all hardware. Ran many wafers through the system. All OK.




More information about the asml-pcs mailing list