From vilanova at snf.stanford.edu Mon Jun 4 09:26:08 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 4 Jun 2012 09:26:08 -0700 Subject: Comment asml SNF 2012-06-04 09:26:08: HotSpot Found On Top Right Hand Side. Cleaned E chuck , Tested All Ok, Ready to use Message-ID: HotSpot Found On Top Right Hand Side. Cleaned E chuck , Tested All Ok, Ready to use From kavehm at snf.stanford.edu Mon Jun 4 12:15:34 2012 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Mon, 4 Jun 2012 12:15:34 -0700 Subject: Shutdown asml SNF 2012-06-04 12:15:33: error Message-ID: Had a software error during run. Aborted run and wafers came out. Tried running batch again, but software locks up when i click batch definition. Might need a software reset. From gsosa at snf.stanford.edu Mon Jun 4 12:47:01 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Jun 2012 12:47:01 -0700 Subject: Shutdown asml SNF 2012-06-04 12:15:33: error Message-ID: Could not enter batch control menu. Did a reboot of unix and Application software. Re-initialized all hardware. Tested operation of system- All OK. From lindaohara at snf.stanford.edu Wed Jun 6 10:31:21 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 6 Jun 2012 10:31:21 -0700 Subject: Comment asml SNF 2012-06-06 10:31:21: ASML Released Reservations 11:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Jun 7 11:21:51 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 7 Jun 2012 11:21:51 -0700 Subject: Comment asml SNF 2012-06-07 11:21:51: ASML Released Reservations 12:00-14:00 Message-ID: From gsosa at snf.stanford.edu Thu Jun 7 15:53:08 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 7 Jun 2012 15:53:08 -0700 Subject: Comment asml SNF 2012-06-07 15:53:07: Hotspot 6/7 Message-ID: Hotspot on test wafer at 9:00. Cleaned E-chuck with tooling. Retest OK. From ysohn at snf.stanford.edu Thu Jun 7 17:46:56 2012 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Thu, 7 Jun 2012 17:46:56 -0700 Subject: Shutdown asml SNF 2012-06-07 17:46:56: Lost wafers in the machine Message-ID: I was processing my 2 wafers and the machine stopped with error messages. My reticle is stucked in the machine as well. Tried Start-up but did not work. I'm truly sorry for inconvenience. From gsosa at snf.stanford.edu Fri Jun 8 09:00:41 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 8 Jun 2012 09:00:41 -0700 Subject: Shutdown asml SNF 2012-06-07 17:46:56: Lost wafers in the machine Message-ID: Retrieved stranded wafers from E-chuck and pre-aligner. System errored for wafer lost at E-Chuck. Checked useres wafers and they did did not float on the granite. PLEASE REMEMBER THAT IT IS YOUR RESPONSIBILITY TO CHECK YOUR WAFERS PRIOR TO RUNNING THEM ON THE STEPPER. IF THE WAFERS ARE BOWED, WARPED OR CONSIDERED HIGH RISK, YOU CANNOT RUN THEM ON OFFSHIFT HOURS AND NEED TO MAKE ARRANGEMENTS WITH STAFF TO TEST OR EXPOSE YOUR WAFERS WHILE WE HAVE RESOURCES HERE TO ASSIST. PLEASE CHECK YOUR WAFERS ON THE GRANITE OR THE STRESSTEST SO YOU KNOW THE CONDITION OF YOUR WAFERS. From calarrudo at snf.stanford.edu Sat Jun 9 16:35:20 2012 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Sat, 9 Jun 2012 16:35:20 -0700 Subject: Problem asml SNF 2012-06-09 16:35:20: Message-ID: unable to open batch control window. From calarrudo at snf.stanford.edu Sat Jun 9 16:40:27 2012 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Sat, 9 Jun 2012 16:40:27 -0700 Subject: Shutdown asml SNF 2012-06-09 16:40:27: Message-ID: bath control window not working. From vilanova at snf.stanford.edu Mon Jun 11 09:39:34 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Jun 2012 09:39:34 -0700 Subject: Shutdown asml SNF 2012-06-09 16:40:27: Message-ID: Full System Reboot and Hardware Reset , System tested, All Operations Ok, Good to use. From vilanova at snf.stanford.edu Mon Jun 11 09:39:52 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Jun 2012 09:39:52 -0700 Subject: Problem asml SNF 2012-06-09 16:35:20: Message-ID: Full System Reboot and Hardware Reset , System tested, All Operations Ok, Good to use. From gyama at snf.stanford.edu Tue Jun 12 17:10:53 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 12 Jun 2012 17:10:53 -0700 Subject: Shutdown asml SNF 2012-06-12 17:10:52: wafer 3 stuck on echuck Message-ID: wafer 1 & 2 exposed wafer 3 stuck on echuck wafer 4-8 in load cassette wafer box on black table across from stepper From gsosa at snf.stanford.edu Wed Jun 13 08:54:17 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 13 Jun 2012 08:54:17 -0700 Subject: Shutdown asml SNF 2012-06-12 17:10:52: wafer 3 stuck on echuck Message-ID: Retrieved stranded wafers from stepper. Re-initialized the system hardware. Performed daily quals. All OK. From lindaohara at snf.stanford.edu Tue Jun 19 09:39:47 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 19 Jun 2012 09:39:47 -0700 Subject: Shutdown asml SNF 2012-06-19 09:39:47: ASML PM Message-ID: From gsosa at snf.stanford.edu Tue Jun 19 16:02:53 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Jun 2012 16:02:53 -0700 Subject: Shutdown asml SNF 2012-06-19 09:39:47: ASML PM Message-ID: Day 1 of monthly PM completed. System tested and is back up for users. PM to continue tomorrow morning. From lindaohara at snf.stanford.edu Wed Jun 20 08:44:56 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 20 Jun 2012 08:44:56 -0700 Subject: Shutdown asml SNF 2012-06-20 08:44:56: Day 2 MPM Message-ID: From gsosa at snf.stanford.edu Wed Jun 20 15:33:13 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 20 Jun 2012 15:33:13 -0700 Subject: Shutdown asml SNF 2012-06-20 08:44:56: Day 2 MPM Message-ID: Day 2 of monthly PM completed. System is back up for labmembers. Monthly PM will continue tomorrow morning. From lindaohara at snf.stanford.edu Thu Jun 21 09:23:17 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 21 Jun 2012 09:23:17 -0700 Subject: Shutdown asml SNF 2012-06-21 09:23:17: ASML Day 3 MPM Message-ID: From gsosa at snf.stanford.edu Thu Jun 21 15:30:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Jun 2012 15:30:48 -0700 Subject: Shutdown asml SNF 2012-06-21 09:23:17: ASML Day 3 MPM Message-ID: Monthly PM is completed. System back up for labmembers use. From lindaohara at snf.stanford.edu Tue Jun 26 18:19:23 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 26 Jun 2012 18:19:23 -0700 Subject: Comment asml SNF 2012-06-26 18:19:22: Up Message-ID: Okay to use, return to SNF. From pding at snf.stanford.edu Wed Jun 27 23:36:27 2012 From: pding at snf.stanford.edu (pding at snf.stanford.edu) Date: Wed, 27 Jun 2012 23:36:27 -0700 Subject: Shutdown asml SNF 2012-06-27 23:36:27: wafer lost in the machine Message-ID: #23 wafer failed on the prealigner. Wafer handling initialization prompted losing the wafer inside the system. ASML service will recover the system on the morning of 6/28. From gsosa at snf.stanford.edu Thu Jun 28 15:17:23 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 28 Jun 2012 15:17:23 -0700 Subject: Shutdown asml SNF 2012-06-28 15:17:22: Shutdown 6/28 Message-ID: ASML stepper is set up for 6" to do critical calibrations. Stepper will be down overnight. From gsosa at snf.stanford.edu Thu Jun 28 15:17:57 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 28 Jun 2012 15:17:57 -0700 Subject: Shutdown asml SNF 2012-06-27 23:36:27: wafer lost in the machine Message-ID: Wafers recovered. system tested out OK. Performed quals. From gsosa at snf.stanford.edu Fri Jun 29 17:04:04 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 29 Jun 2012 17:04:04 -0700 Subject: Shutdown asml SNF 2012-06-28 15:17:22: Shutdown 6/28 Message-ID: ASML Applications group are done with the stepper until next Monday. Labmembers are free to use the tool now. Releasing the remainder of ASML's reservation. Please reports any problems in Coral. From gsosa at snf.stanford.edu Fri Jun 29 17:04:42 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 29 Jun 2012 17:04:42 -0700 Subject: Comment asml SNF 2012-06-29 17:04:41: Update 6/29 Message-ID: ASML Applications group are done with the stepper until next Monday. Labmembers are free to use the tool now. Releasing the remainder of ASML's reservation. Please reports any problems in Coral.