Shutdown asml SNF 2012-06-04 12:15:33: error

kavehm at snf.stanford.edu kavehm at snf.stanford.edu
Mon Jun 4 12:15:34 PDT 2012


Had a software error during run. Aborted run and wafers came out. Tried running batch again, but software locks up when i click batch definition. Might need a software reset.




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