Shutdown asml SNF 2012-06-07 17:46:56: Lost wafers in the machine

ysohn at snf.stanford.edu ysohn at snf.stanford.edu
Thu Jun 7 17:46:56 PDT 2012


I was processing my 2 wafers and the machine stopped with error messages. 
My reticle is stucked in the machine as well.
Tried Start-up but did not work.
I'm truly sorry for inconvenience.




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