Shutdown asml SNF 2012-06-07 17:46:56: Lost wafers in the machine

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jun 8 09:00:41 PDT 2012


Retrieved stranded wafers from E-chuck and pre-aligner. System errored for wafer lost at  E-Chuck. Checked useres wafers and they did did not float on the granite. PLEASE REMEMBER THAT IT IS YOUR RESPONSIBILITY TO CHECK YOUR WAFERS PRIOR TO RUNNING THEM ON THE STEPPER. IF THE WAFERS ARE BOWED, WARPED  OR CONSIDERED HIGH RISK, YOU CANNOT RUN THEM ON OFFSHIFT HOURS AND NEED TO MAKE ARRANGEMENTS WITH STAFF TO TEST OR EXPOSE YOUR WAFERS WHILE WE HAVE RESOURCES HERE TO ASSIST. PLEASE CHECK YOUR WAFERS ON THE GRANITE OR THE STRESSTEST SO YOU KNOW THE CONDITION OF YOUR WAFERS.




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