Shutdown asml SNF 2012-06-12 17:10:52: wafer 3 stuck on echuck

gyama at snf.stanford.edu gyama at snf.stanford.edu
Tue Jun 12 17:10:53 PDT 2012

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wafer 1 & 2 exposed
wafer 3 stuck on echuck
wafer 4-8 in load cassette
wafer box on black table across from stepper

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