Shutdown asml SNF 2012-06-12 17:10:52: wafer 3 stuck on echuck

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Jun 13 08:54:17 PDT 2012

Previous message: Shutdown asml SNF 2012-06-12 17:10:52: wafer 3 stuck on echuck
Next message: Shutdown asml SNF 2012-06-19 09:39:47: ASML PM
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Retrieved stranded wafers from stepper. Re-initialized the system hardware. Performed daily quals. All OK.

Previous message: Shutdown asml SNF 2012-06-12 17:10:52: wafer 3 stuck on echuck
Next message: Shutdown asml SNF 2012-06-19 09:39:47: ASML PM
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the asml-pcs mailing list