Shutdown asml SNF 2012-06-27 23:36:27: wafer lost in the machine

pding at snf.stanford.edu pding at snf.stanford.edu
Wed Jun 27 23:36:27 PDT 2012


#23 wafer failed on the prealigner.  Wafer handling initialization prompted losing the wafer inside the system. ASML service will recover the system on the morning of 6/28.




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