From gsosa at snf.stanford.edu Sat Mar 3 09:13:44 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 3 Mar 2012 09:13:44 -0800 Subject: Shutdown asml SNF 2012-03-03 09:13:43: scheduled repair 2/3 Message-ID: Vendor is here to replace the rotary mechinism which is needed to swing the wafer stage out when servicing the tool. From gsosa at snf.stanford.edu Sat Mar 3 18:20:42 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 3 Mar 2012 18:20:42 -0800 Subject: Shutdown asml SNF 2012-03-03 09:13:43: scheduled repair 2/3 Message-ID: Vendor completed the replacement of the rotary unit for moving the stone in and out. ASML will have to schedule time at a later date to fine-tune the mechanism. The tool is back up for frontside align only. From gsosa at snf.stanford.edu Sat Mar 3 18:21:08 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 3 Mar 2012 18:21:08 -0800 Subject: Comment asml SNF 2012-03-03 18:21:07: Tool Update 3/3 Message-ID: Vendor completed the replacement of the rotary unit for moving the stone in and out. ASML will have to schedule time at a later date to fine-tune the mechanism. The tool is back up for frontside align only. From lindaohara at snf.stanford.edu Tue Mar 6 10:51:22 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 6 Mar 2012 10:51:22 -0800 Subject: Comment asml SNF 2012-03-06 10:51:21: ASML Released Reservations 11:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Wed Mar 7 13:08:52 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 7 Mar 2012 13:08:52 -0800 Subject: Comment asml SNF 2012-03-07 13:08:52: ASML available until 14:30 Message-ID: From lindaohara at snf.stanford.edu Wed Mar 7 15:02:20 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 7 Mar 2012 15:02:20 -0800 Subject: Comment asml SNF 2012-03-07 15:02:19: 6 " Wafer Conversion Started Message-ID: From gsosa at snf.stanford.edu Wed Mar 7 15:49:22 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 7 Mar 2012 15:49:22 -0800 Subject: Shutdown asml SNF 2012-03-07 15:49:22: 6" ASML demo in Progress Message-ID: ASML is doing a 6" customer demo. The system is down to users until the completion of the demo, when the tool is converted back to 4 Inch. From mahnaz at snf.stanford.edu Fri Mar 9 18:30:12 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 9 Mar 2012 18:30:12 -0800 Subject: Shutdown asml SNF 2012-03-07 15:49:22: 6" ASML demo in Progress Message-ID: It has been a long day but thanks to Chris Ringwelski ( asml fse) and Linda, the system is up and ready for use. Please keep in mind that system is up only for top side alignment. 3D has not been calibrated. We just did particle on the chuck so please follow the back side cleaning protocol for your wafers. If rusty, there is a copy of the clean procedure in the binder next to the tool. From mahnaz at snf.stanford.edu Fri Mar 9 18:30:25 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 9 Mar 2012 18:30:25 -0800 Subject: Comment asml SNF 2012-03-06 10:51:21: ASML Released Reservations 11:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Fri Mar 9 18:30:38 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 9 Mar 2012 18:30:38 -0800 Subject: Comment asml SNF 2012-03-07 13:08:52: ASML available until 14:30 Message-ID: From mahnaz at snf.stanford.edu Fri Mar 9 18:30:46 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 9 Mar 2012 18:30:46 -0800 Subject: Comment asml SNF 2012-03-07 15:02:19: 6 " Wafer Conversion Started Message-ID: From mahnaz at snf.stanford.edu Fri Mar 9 18:30:55 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 9 Mar 2012 18:30:55 -0800 Subject: Comment asml SNF 2012-02-23 09:57:08: Reservations released 2/23 Message-ID: From mahnaz at snf.stanford.edu Fri Mar 9 18:31:01 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 9 Mar 2012 18:31:01 -0800 Subject: Comment asml SNF 2012-02-22 13:00:30: Update 2/22/12 Message-ID: From mahnaz at snf.stanford.edu Fri Mar 9 18:31:12 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 9 Mar 2012 18:31:12 -0800 Subject: Comment asml SNF 2012-03-03 18:21:07: Tool Update 3/3 Message-ID: From mahnaz at snf.stanford.edu Fri Mar 9 18:31:23 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 9 Mar 2012 18:31:23 -0800 Subject: Comment asml SNF 2011-11-18 11:06:14: ASML Released Reservations 11:30-14:00 Message-ID: From mahnaz at snf.stanford.edu Fri Mar 9 18:31:30 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 9 Mar 2012 18:31:30 -0800 Subject: Comment asml SNF 2011-11-22 10:05:55: reservations Released 11/22 Message-ID: From mahnaz at snf.stanford.edu Fri Mar 9 18:31:48 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 9 Mar 2012 18:31:48 -0800 Subject: Comment asml SNF 2011-12-11 12:40:49: Update 12/11/11 Message-ID: From mahnaz at snf.stanford.edu Fri Mar 9 18:32:37 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 9 Mar 2012 18:32:37 -0800 Subject: Comment asml SNF 2012-03-09 18:32:36: top side up ONLY Message-ID: From lindaohara at snf.stanford.edu Tue Mar 13 10:40:22 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 13 Mar 2012 10:40:22 -0700 Subject: Comment asml SNF 2012-03-13 10:40:21: ASML CSE Lamp Change Message-ID: From lindaohara at snf.stanford.edu Tue Mar 13 12:32:50 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 13 Mar 2012 12:32:50 -0700 Subject: Comment asml SNF 2012-03-13 12:32:49: ASML Lamp Change Completed Message-ID: From lindaohara at snf.stanford.edu Tue Mar 13 12:33:45 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 13 Mar 2012 12:33:45 -0700 Subject: Comment asml SNF 2012-03-13 12:33:44: ASML Released reservations until 14:00 Message-ID: From lindaohara at snf.stanford.edu Wed Mar 14 09:52:17 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 14 Mar 2012 09:52:17 -0700 Subject: Comment asml SNF 2012-03-14 09:52:16: ASML Released Reservations 10:00-14:00 Message-ID: From gsosa at snf.stanford.edu Fri Mar 16 09:43:12 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Mar 2012 09:43:12 -0700 Subject: Shutdown asml SNF 2012-03-16 09:43:12: Incoming air too high Message-ID: The lab temperature by the stepper is almost 24 degrees C. The stepper is reporting that thi incoming air temperature is out of warning range From lindaohara at snf.stanford.edu Fri Mar 16 12:32:26 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 16 Mar 2012 12:32:26 -0700 Subject: Shutdown asml SNF 2012-03-16 09:43:12: Incoming air too high Message-ID: incoming air ok. From lindaohara at snf.stanford.edu Fri Mar 16 12:33:19 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 16 Mar 2012 12:33:19 -0700 Subject: Comment asml SNF 2012-03-16 12:33:19: ASML Released Reservations 12:30-14:00 Message-ID: From gsosa at snf.stanford.edu Tue Mar 20 08:44:40 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 20 Mar 2012 08:44:40 -0700 Subject: Shutdown asml SNF 2012-03-20 08:44:39: Monthly PM- Day 1 Message-ID: Monthly PM in progress From gsosa at snf.stanford.edu Tue Mar 20 15:35:01 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 20 Mar 2012 15:35:01 -0700 Subject: Shutdown asml SNF 2012-03-20 08:44:39: Monthly PM- Day 1 Message-ID: Day 1 of Monthly PM completed. Stepper is OK to use From gsosa at snf.stanford.edu Tue Mar 20 15:35:20 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 20 Mar 2012 15:35:20 -0700 Subject: Comment asml SNF 2012-03-20 15:35:19: Update 3/20 Message-ID: Day 1 of Monthly PM completed. Stepper is OK to use From gsosa at snf.stanford.edu Wed Mar 21 08:12:00 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 21 Mar 2012 08:12:00 -0700 Subject: Shutdown asml SNF 2012-03-21 08:11:59: Monthly PM, Day 2 Message-ID: Day 2 of monthly PM From mahnaz at snf.stanford.edu Wed Mar 21 14:55:20 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 21 Mar 2012 14:55:20 -0700 Subject: Shutdown asml SNF 2012-03-21 08:11:59: Monthly PM, Day 2 Message-ID: Day 2 PM is completed. System is avaliable for use. From gsosa at snf.stanford.edu Thu Mar 22 15:16:39 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:16:39 -0700 Subject: Comment asml SNF 2012-03-22 15:16:38: Monthly PM completed 3/22 Message-ID: Monthly PM completed. 3D align has been calibrated. All in spec. Tool is released for front and backside align. From gsosa at snf.stanford.edu Thu Mar 22 15:17:31 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:17:31 -0700 Subject: Comment asml SNF 2012-03-22 15:17:30: Up for front and backside align Message-ID: Monthly PM completed. 3D align has been calibrated. All in spec. Tool is released for front and backside align. From gsosa at snf.stanford.edu Thu Mar 22 15:19:12 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:19:12 -0700 Subject: Comment asml SNF 2011-11-15 14:11:18: Up for all processing 11/15 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:19:17 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:19:17 -0700 Subject: Comment asml SNF 2011-11-16 13:48:49: ASML Released Reservations 14:00-16:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:19:25 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:19:25 -0700 Subject: Comment asml SNF 2011-11-16 13:50:16: MPM Day 1 Completed Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:19:31 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:19:31 -0700 Subject: Comment asml SNF 2011-11-17 16:21:58: PM completed Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:19:37 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:19:37 -0700 Subject: Comment asml SNF 2011-12-03 19:39:17: error Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:19:44 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:19:44 -0700 Subject: Comment asml SNF 2011-12-03 19:53:00: worked normally for me. Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:19:51 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:19:51 -0700 Subject: Comment asml SNF 2011-12-05 15:23:51: Hotspot 12/5 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:19:58 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:19:58 -0700 Subject: Comment asml SNF 2011-12-12 10:02:03: ASML combi reticle Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:20:03 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:20:03 -0700 Subject: Comment asml SNF 2011-12-12 17:56:34: 6" Demo Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:20:09 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:20:09 -0700 Subject: Comment asml SNF 2012-03-09 18:32:36: top side up ONLY Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:20:18 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:20:18 -0700 Subject: Comment asml SNF 2012-03-13 10:40:21: ASML CSE Lamp Change Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:20:27 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:20:27 -0700 Subject: Comment asml SNF 2011-11-17 16:03:32: ASML Day 2 Completed Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:20:34 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:20:34 -0700 Subject: Comment asml SNF 2012-03-13 12:32:49: ASML Lamp Change Completed Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:20:41 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:20:41 -0700 Subject: Comment asml SNF 2012-03-13 12:33:44: ASML Released reservations until 14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:20:48 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:20:48 -0700 Subject: Comment asml SNF 2012-03-14 09:52:16: ASML Released Reservations 10:00-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:20:58 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:20:58 -0700 Subject: Comment asml SNF 2012-03-16 12:33:19: ASML Released Reservations 12:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:21:10 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:21:10 -0700 Subject: Comment asml SNF 2011-10-27 15:28:31: software reload on the ASML Emulator (SAWS) Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:21:41 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:21:41 -0700 Subject: Problem asml SNF 2011-03-08 15:38:20: System is up for Front SIDE ONLY Message-ID: To Archive From gsosa at snf.stanford.edu Thu Mar 22 15:22:14 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:22:14 -0700 Subject: Problem asml SNF 2011-03-01 09:23:03: Intermittent Prob Carrier Inspection Message-ID: To Archive From gsosa at snf.stanford.edu Fri Mar 23 09:32:59 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Mar 2012 09:32:59 -0700 Subject: Comment asml SNF 2012-03-23 09:32:58: Hotspots 3/23 Message-ID: 2 hotspots on test wafer this morning. 1 in center and 1 near major flat. Cleaned E-chuck with tooling. Retest OK. From xuanwu at snf.stanford.edu Sat Mar 24 01:49:33 2012 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Sat, 24 Mar 2012 01:49:33 -0700 Subject: Problem asml SNF 2012-03-24 01:49:33: Re: software stuck Message-ID: Won't unlock reticle box or exit the main menu. No wafers loaded yet. I accidentally clicked "Misc" in the menu at one point. From gyama at snf.stanford.edu Sat Mar 24 06:56:25 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sat, 24 Mar 2012 06:56:25 -0700 Subject: Problem asml SNF 2012-03-24 06:56:25: reticle box in tool, unable to unload Message-ID: previous user had software lock up no keyboard response From cmcg at snf.stanford.edu Sat Mar 24 13:36:11 2012 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sat, 24 Mar 2012 13:36:11 -0700 Subject: Problem asml SNF 2012-03-24 13:36:11: terminal exited, cannot login in Message-ID: due to the reticle loader crash, the terminal was exited. We don't know the login and are standing by. From cmcg at snf.stanford.edu Sat Mar 24 13:57:44 2012 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sat, 24 Mar 2012 13:57:44 -0700 Subject: Shutdown asml SNF 2012-03-24 13:57:43: don't know login Message-ID: had to exit terminal due to reticle elevator problem, don't know the login From gsosa at snf.stanford.edu Sun Mar 25 09:20:05 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 25 Mar 2012 09:20:05 -0700 Subject: Shutdown asml SNF 2012-03-24 13:57:43: don't know login Message-ID: Restarted the application software. Did full startup to initialize all subsystem hardware- Full startup OK. Cycle 18 wafes through system with test job-OK. Performed daily test queue- all in spec. System OK to use. From gsosa at snf.stanford.edu Sun Mar 25 09:20:10 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 25 Mar 2012 09:20:10 -0700 Subject: Problem asml SNF 2012-03-24 13:36:11: terminal exited, cannot login in Message-ID: Restarted the application software. Did full startup to initialize all subsystem hardware- Full startup OK. Cycle 18 wafes through system with test job-OK. Performed daily test queue- all in spec. System OK to use. From gsosa at snf.stanford.edu Sun Mar 25 09:20:14 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 25 Mar 2012 09:20:14 -0700 Subject: Problem asml SNF 2012-03-24 06:56:25: reticle box in tool, unable to unload Message-ID: Restarted the application software. Did full startup to initialize all subsystem hardware- Full startup OK. Cycle 18 wafes through system with test job-OK. Performed daily test queue- all in spec. System OK to use. From gsosa at snf.stanford.edu Sun Mar 25 09:20:20 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 25 Mar 2012 09:20:20 -0700 Subject: Problem asml SNF 2012-03-24 01:49:33: Re: software stuck Message-ID: Restarted the application software. Did full startup to initialize all subsystem hardware- Full startup OK. Cycle 18 wafes through system with test job-OK. Performed daily test queue- all in spec. System OK to use. From gsosa at snf.stanford.edu Sun Mar 25 09:20:58 2012 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 25 Mar 2012 09:20:58 -0700 Subject: Comment asml SNF 2012-03-25 09:20:58: System Up 3/.25 Message-ID: Restarted the application software. Did full startup to initialize all subsystem hardware- Full startup OK. Cycle 18 wafes through system with test job-OK. Performed daily test queue- all in spec. System OK to use. From lindaohara at snf.stanford.edu Tue Mar 27 10:47:42 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 27 Mar 2012 10:47:42 -0700 Subject: Comment asml SNF 2012-03-27 10:47:42: ASML Released Reservations 11:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Wed Mar 28 11:42:35 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 28 Mar 2012 11:42:35 -0700 Subject: Problem asml SNF 2012-03-28 11:42:34: 3D is down Message-ID: Just found out that 3D needs to be caliberated . Till further notice 3D will be out of commission. From lindaohara at snf.stanford.edu Thu Mar 29 10:00:06 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 29 Mar 2012 10:00:06 -0700 Subject: Shutdown asml SNF 2012-03-29 10:00:06: ASML doing 3D PM Message-ID: From lindaohara at snf.stanford.edu Thu Mar 29 15:36:51 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 29 Mar 2012 15:36:51 -0700 Subject: Shutdown asml SNF 2012-03-29 10:00:06: ASML doing 3D PM Message-ID: Up top side only. 3D down. From lindaohara at snf.stanford.edu Thu Mar 29 15:39:09 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 29 Mar 2012 15:39:09 -0700 Subject: Comment asml SNF 2012-03-29 15:39:09: Hotspot ck Message-ID: Hotspot ck this morning @ 8:30am and found two hotspots. one at 4 o'clock and one at 8 o'clock. ASML CSE cleaned the chuck. Hotspot ck ok, no hotspots. From lindaohara at snf.stanford.edu Fri Mar 30 08:09:59 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 30 Mar 2012 08:09:59 -0700 Subject: Comment asml SNF 2012-03-30 08:09:59: Doing 3D Calibration Message-ID: From lindaohara at snf.stanford.edu Fri Mar 30 14:17:22 2012 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 30 Mar 2012 14:17:22 -0700 Subject: Comment asml SNF 2012-03-30 14:17:22: Up for use Message-ID: Up for topside only. 3D down. From cmcg at snf.stanford.edu Fri Mar 30 18:31:02 2012 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Fri, 30 Mar 2012 18:31:02 -0700 Subject: Problem asml SNF 2012-03-30 18:31:02: energy sensor temperature out of range errors Message-ID: not sure if that means anything, wafers are processing.... From mahnaz at stanford.edu Sat Mar 31 17:40:54 2012 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Sat, 31 Mar 2012 17:40:54 -0700 Subject: Problem asml SNF 2012-03-30 18:31:02: energy sensor temperature out of range errors In-Reply-To: <20120331013103.2022C208EC@smtp-unencrypted.stanford.edu> References: <20120331013103.2022C208EC@smtp-unencrypted.stanford.edu> Message-ID: <4F77A416.5020603@stanford.edu> We get the error once in a while, there are no issue with it. mahnaz On 3/30/2012 6:31 PM, cmcg at snf.stanford.edu wrote: > not sure if that means anything, wafers are processing.... >