Shutdown asml SNF 2012-03-03 09:13:43: scheduled repair 2/3

gsosa at gsosa at
Sat Mar 3 18:20:42 PST 2012

Vendor completed the replacement of the rotary unit for moving the stone in and out. ASML will have to schedule time at a later date to fine-tune the mechanism. The tool is back up for frontside align only.

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