Shutdown asml SNF 2012-03-07 15:49:22: 6" ASML demo in Progress

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Mar 9 18:30:12 PST 2012


It has been a long day but thanks to Chris Ringwelski ( asml fse) and Linda, the system is up and ready for use.
Please keep in mind that system is up only for top side alignment.
3D  has not been calibrated.
We just did particle on the chuck so please follow the back side 
 cleaning  protocol for your wafers.
If rusty, there is a copy of the clean procedure  in the binder next to the 
tool.




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