Shutdown asml SNF 2012-03-16 09:43:12: Incoming air too high

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Mar 16 09:43:12 PDT 2012


The lab temperature by the stepper is almost 24 degrees C. The stepper is reporting that thi incoming air temperature is out of warning range




More information about the asml-pcs mailing list