Comment asml SNF 2012-03-23 09:32:58: Hotspots 3/23

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Mar 23 09:32:59 PDT 2012


2 hotspots on test wafer this morning. 1 in center and 1 near major flat. Cleaned E-chuck with tooling. Retest OK.




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