Problem asml SNF 2012-03-24 06:56:25: reticle box in tool, unable to unload

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sun Mar 25 09:20:14 PDT 2012


Restarted the application software. Did full startup to initialize all subsystem hardware- Full startup OK. Cycle 18 wafes through system with test job-OK. Performed daily test queue- all in spec. System OK to use.




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