Problem asml SNF 2012-03-24 01:49:33: Re: software stuck

gsosa at gsosa at
Sun Mar 25 09:20:20 PDT 2012

Restarted the application software. Did full startup to initialize all subsystem hardware- Full startup OK. Cycle 18 wafes through system with test job-OK. Performed daily test queue- all in spec. System OK to use.

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