Comment asml SNF 2012-03-29 15:39:09: Hotspot ck

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Thu Mar 29 15:39:09 PDT 2012


Hotspot ck this morning @ 8:30am and found two hotspots. one at 4 o'clock and one at 8 o'clock. ASML CSE cleaned the chuck. Hotspot ck ok, no hotspots.




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