Problem asml SNF 2012-03-30 18:31:02: energy sensor temperature out of range errors

Mahnaz Mansourpour mahnaz at stanford.edu
Sat Mar 31 17:40:54 PDT 2012


We get the error once in a while, there are no issue with it.
mahnaz

On 3/30/2012 6:31 PM, cmcg at snf.stanford.edu wrote:
> not sure if that means anything, wafers are processing....
>



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