Shutdown asml SNF 2012-04-27 15:09:00: Tool Shutdown 4/27

gsosa at gsosa at
Tue May 1 18:34:54 PDT 2012

ASML vendor inspected level sensor optics and ran many diagnostics test to verify the integrity of the level sensor optics. Performed BMCcalibrations and updated M/C's. Performed white lite FEM , Tilt to Tilt maching and updated MC's. Performed Red/Blue test and optimized system state. Redefined system reference state for IQC Repeated R/B test to confirm good system state- All OK. Checked lamp uniformity- OK. Exposed a hotspot wafer- OK. System is up for frontside align only. 3D alignment system to be calibrated at a later date. Please inspect your wafers closely after exposure and report any problms, if any.

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