Shutdown asml SNF 2012-05-03 09:28:38: Shutdown 5/3
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Thu May 3 09:28:38 PDT 2012
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Comment asml SNF 2012-05-02 19:57:45: wafer hood broken
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Shutdown asml SNF 2012-05-03 09:28:38: Shutdown 5/3
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ASML needs to investigate a potential wafer scratching problem.
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Comment asml SNF 2012-05-02 19:57:45: wafer hood broken
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Shutdown asml SNF 2012-05-03 09:28:38: Shutdown 5/3
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