Problem asml SNF 2012-05-06 17:30:21: ASML software frozen

ysohn at snf.stanford.edu ysohn at snf.stanford.edu
Sun May 6 17:30:22 PDT 2012


While I was modifying job file, software froze.
I tried to delete image distribution, and software stopped working.
Except that window, other software worked normally, for example 'Mat Handle'.
I took out all reticles and wafers from the machine.




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