Problem asml SNF 2012-05-06 17:30:21: ASML software frozen

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon May 7 08:45:03 PDT 2012

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Ran System Quals ,System wasnt Frozen When I  Irrived,
 System Worked Fine, Exposed wafers,
Zero Hotspots, Ready to use.

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