Shutdown asml SNF 2012-05-11 18:13:24: Wafer lost inside machine

bchui at bchui at
Fri May 11 18:13:25 PDT 2012

Was running a batch of 8 wafers, first 4 went fine.  Error occurred on 5th wafer; machine says wafer lost.  I have taken out the 4 completed wafers and 1 unexposed wafer, machine display shows only two wafers in system, should be 3.

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