Shutdown asml SNF 2012-05-11 18:13:24: Wafer lost inside machine

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri May 11 23:06:14 PDT 2012


Removed the wafers stranded in the tool. Re-initialized tool and tested wafrer handling with dummy job. Cleaned the e-chuck and verified with hotspot test-OK. Wafers are quarantined until further investigation is done. Please do not run anymore wafers from this lot over the weekend 




More information about the asml-pcs mailing list